Iyo cathodic arc sosi ion coating yakangofanana nehumwe matekinoroji ekupfeka, uye mamwe mavhisi akadai sekuisa maworkpiece uye vacuum haachadzokororwe.
1.Bombardment kuchenesa yeworkpieces
Asati apfeka, argon gasi inounzwa mukamuri yekuputira ine vacuum ye2 × 10-2Pa.
Batidza pulse bias power supply, ine duty cycle ye20% uye workpiece bias ye800-1000V.
Kana iyo arc simba ikabatidzwa, inotonhora yemunda arc light discharge inogadzirwa, iyo inoburitsa yakawanda maerekitironi ikozvino uye titanium ion ikozvino kubva kune arc sosi, ichigadzira yakakwirira-density plasma.Iyo titanium ion inomhanyisa jekiseni rayo muworkpiece pasi peiyo yakaipa yakakwirira bias pressure inoshandiswa kune workpiece, bombarding uye sputtering yasara gasi uye zvinosvibisa adsorbed pamusoro penzvimbo workpiece, uye kuchenesa uye kuchenesa pamusoro workpiece;Panguva imwecheteyo, gasi reklorini mukamuri yekuputira inoiswa ionized nema electrons, uye argon ions inomhanyisa bombardment yenzvimbo yebasa.
Naizvozvo, iyo bombardment yekuchenesa mhedzisiro yakanaka.Inenge miniti imwe chete yekuchenesa bombardment inogona kuchenesa iyo workpiece, inonzi "main arc bombardment".Nekuda kwehukuru hukuru hwetitanium ions, kana diki arc sosi yakashandiswa kubhomba uye kuchenesa iyo workpiece kwenguva yakareba, tembiricha yebasa rinowanzo kudziya, uye mupendero wemidziyo unogona kupfava.Mukugadzirwa kwakawanda, madiki arc masosi anobatidzwa rimwe nerimwe kubva kumusoro kusvika pasi, uye yega yega arc sosi ine bombardment yekuchenesa nguva ingangoita 1 miniti.
(1) Kupfekedza titanium pasi peya
Kuti uvandudze kunamatira pakati pefirimu uye substrate, chidimbu che pure titanium substrate inowanzoputirwa isati yaputira titanium nitride.Gadzirisa iyo vacuum level kusvika 5 × 10-2-3 × 10-1Pa, gadzirisa iyo workpiece bias voltage kusvika 400-500V, uye gadzirisa basa kutenderera kwe pulse bias power supply kusvika 40% ~ 50%.Ndichiri kubatidza madiki arc masosi imwe neimwe kugadzira inotonhora munda arcing discharge.Nekuda kwekuderera kweiyo negative bias voltage yeworkpiece, simba retitanium ion rinodzikira.Mushure mekusvika kune workpiece, sputtering effect ishoma pane deposition effect, uye titanium transition layer inoumbwa pane workpiece kuvandudza simba rekubatanidza pakati petitanium nitride hard film layer uye substrate.Iyi nzira zvakare inzira yekupisa iyo workpiece.Kana iyo chaiyo titanium tarisiro yaburitswa, mwenje muplasma unoratidzika kunge bhuruu.
1.Ammoniated mbiya yakaoma film coating
Gadzirisa iyo vacuum degree ku3 × 10-1-5Pa, gadzirisa workpiece bias voltage kusvika 100-200V, uye gadzirisa duty cycle ye pulse bias power supply kusvika 70% ~ 80%.Mushure mekunge nitrogen yaunzwa, titanium inosanganisa kuita nearc discharge plasma kuisa titanium nitride hard film.Panguva ino, mwenje weplasma mukamuri yekutsvaira ndeye cherry tsvuku.Kana C2H2, O2, nezvimwewo zvinounzwa, TiCN, TiO2, nezvimwewo zvinyorwa zvemafirimu zvinogona kuwanikwa.
-Chinyorwa ichi chakaburitswa naGuangdong Zhenhua, avacuum coating machine mugadziri
Nguva yekutumira: Jun-01-2023