Magnetic filtration tekinoroji

Basic theory yemagnetic filtration device
Iyo yekusefa dhizaini yekusefa mudziyo wezvimedu zvakakura muplasma danda iri seizvi:
Uchishandisa mutsauko uripo pakati peplasma nezvikamu zvihombe zvinotakura uye kubhadharisa-kune-huwandu reshiyo, pane "chipingamupinyi" (chingave bhaffle kana curved chubhu madziro) chinoisa pakati pe substrate uye cathode pamusoro, iyo inovharira chero zvimedu zvinofamba mukati. mutsara wakatwasuka pakati pecathode uye substrate, nepo ion inogona kutsauswa neiyo magineti uye ichipfuura nepakati pe "chipingamupinyi" kune substrate.

Kushanda musimboti wemagnetic filtration mudziyo

Munzvimbo yemagineti, Pe <

Pe nePi ndiyo Larmor radii yemaerekitironi nemaoni zvichiteerana, uye a ndiyo dhayamita yemukati megineti sefa.Maerekitironi ari muplasma anobatwa nechisimba cheLorentz uye anotenderera achitevedza magineti axially, ukuwo magineti ane simba shoma pakusangana kwemaion nekuda kwemusiyano uripo pakati pemaioni nemaerekitironi muLarmor radius.Nekudaro, kana maerekitironi achifamba paaxis yegineti sefa mudziyo, inokwezva maion pamwe neaxial yekutenderera inofamba nekuda kwekutarisa kwayo uye simba rakasimba remagetsi emagetsi, uye kumhanya kweerekitironi kwakakura kupfuura ayoni, saka maerekitironi. gara uchikwevera iyo ion kumberi, nepo plasma inogara ichingoramba iine quasi-magetsi isina kwayakarerekera.Zvimedu zvihombe hazvina kwazvakarerekera pamagetsi kana kubhadhariswa zvisina kunaka zvishoma, uye mhando yacho yakakura kudarika maion nemaerekitironi, haina kukanganiswa nemagnetic field uye mutsara wekufamba uchitevedza inertia, uye inoseferwa kunze mushure mekudhumhana nemadziro emukati memadziro. mudziyo.
Pasi pebasa rakabatanidzwa rekukombama remagineti curvature uye gradient drift uye ion-electron kudhumhana, plasma inogona kutsauswa mugineti yekusefa mudziyo.In The common theoretical models anoshandiswa nhasi ndiyo Morozov flux model uye Davidson rigid rotor model, ine zvinotevera zvinowanzoitika: kune magnetic field inoita kuti maerekitironi afambe nenzira yakasimba yehelical.
Simba remagineti rinotungamira kufamba kweaxial yeplasma mune magineti kusefa mudziyo unofanirwa kunge wakadaro:

Mi, Vo, uye Z ndiwo maion mass, kukurumidza kwekufambisa, uye nhamba yemhosva inotakurwa zvichiteerana.a ndiyo dhayamita yemukati yegineti sefa, uye e ndiyo ichaja maerekitironi.
Zvinofanira kucherechedzwa kuti mamwe epamusoro simba ayoni haigoni kusungwa zvizere nerekitironi danda.Vanogona kusvika kumadziro emukati megineti sefa, zvichiita kuti madziro emukati ave neakanaka, izvo zvinotadzisa iyo ions kuramba ichisvika kumadziro emukati uye inoderedza kurasikirwa kweplasma.
Zvinoenderana nechiitiko ichi, yakakodzera bias pressure inogona kuiswa kumadziro eiyo magineti sefa mudziyo kumisa kudhumhana kwemaion kuvandudza chinangwa chekufambisa ion.

Kurongwa kwemagnetic filtration device
(1) Linear chimiro.Iyo magineti inoshanda segwara rekuyerera kweion beam, ichidzikisa saizi yenzvimbo yecathode uye chikamu chemacroscopic particle clusters, uku ichiwedzera kudhumhana mukati meplasma, zvichiita kuti kushandurwa kwezvimedu zvisina kwazvakarerekera kuita ion uye kuderedza huwandu hwemacroscopic. particle clusters, uye nekukurumidza kuderedza nhamba yezvimedu zvakakura sezvo simba remagineti rinowedzera.Zvichienzaniswa neyakajairwa multi-arc ion coating method, ichi chakarongeka chigadziriso chinokunda kudzikisira kwakakosha kwekubudirira kunokonzerwa nedzimwe nzira uye chinogona kuve nechokwadi chenguva dzose yekuisa bhaisikopo chiyero ichidzikisa huwandu hwezvikamu zvakakura ne60%.
(2) Curve-mhando chimiro.Kunyangwe chimiro chine mafomu akasiyana, asi musimboti wekutanga wakafanana.Iyo plasma inofamba pasi pebasa rakabatanidzwa remagineti nemunda wemagetsi, uye iyo magineti inoshandiswa kuvharira nekudzora plasma pasina kutsausa mafambiro achitevedza gwara remagineti simba mitsara.Uye zvimedu zvisingabhadharwi zvichafamba zvichitevedza mutsara uye zvichaparadzaniswa.Mafirimu akagadzirwa neichi chigadziriso chine kuoma kwakanyanya, kuderera kwepasi roughness, yakanaka density, saizi yezviyo yakafanana, uye yakasimba firimu base adhesion.Ongororo yeXPS inoratidza kuti kuomarara kwepamusoro kwemafirimu e-ta-C akaputirwa nemhando iyi yemudziyo anogona kusvika 56 GPa, saka iyo yakakomberedzwa dhizaini ndiyo inonyanya kushandiswa uye inoshanda nzira yekubvisa chidimbu chakakura, asi chinangwa chekufambisa ion chinoda kuve. yakawedzera kuvandudzika.Iyo 90 ° bend magineti kusefa mudziyo ndeimwe yeanonyanya kushandiswa yakakomberedzwa magadzirirwo emidziyo.Zviyedzo pachimiro chepamusoro cheTa-C mafirimu zvinoratidza kuti chimiro chepamusoro che360 ° bend magineti yekusefa mudziyo haichinji zvakanyanya kana ichienzaniswa ne90 ° bend magineti yekusefa mudziyo, saka mhedzisiro ye90 ° bend magineti kusefa kwezvimedu zvihombe zvinogona kunge zvakanyanya. kubudirira.90 ° bend magnetic filtration device inonyanya kuve nemhando mbiri dzezvivakwa: imwe bend solenoid yakaiswa mukamuri yevacuum, uye imwe inoiswa kunze kwekamuri yevacuum, uye mutsauko pakati pavo unongova muchimiro.Iko kushanda kwe90 ° bend magnetic filtration device iri muhurongwa hwe 10-2Pa, uye inogona kushandiswa mune zvakasiyana-siyana zvekushandisa, zvakadai sekuputira nitride, oxide, amorphous carbon, semiconductor firimu uye simbi kana isiri-simbi firimu. .

Kushanda kwemagnetic filtration device
Sezvo zvisiri zvese zvakakura zvimedu zvinogona kurasikirwa kinetic simba mukurovera kunoramba kuripo nemadziro, imwe nhamba yezvimedu zvakakura ichasvika kune substrate kuburikidza nepombi yekubuda.Nokudaro, iyo yakareba uye yakamanikana magnetic filtration device ine yakakwirira yefiltration inobudirira yezvikamu zvakakura, asi panguva ino ichawedzera kurasikirwa kweiyoni inotarirwa uye panguva imwechete inowedzera kuoma kwechimiro.Naizvozvo, kuve nechokwadi chekuti iyo magineti yekusefa mudziyo ine yakanakisa kubviswa kwechikamu uye kugona kwakanyanya kwekutakura ion chinhu chinodiwa kuti multi-arc ion coating tekinoroji kuve netarisiro yakakura yekushandisa mukuisa yakakwira kuita mafirimu matete.Iko kushanda kweiyo magineti yekusefa mudziyo kunokanganiswa neiyo magineti simba, bend bias, mechanical baffle aperture, arc source yazvino uye inochajiswa particle incidence angle.Nekumisikidza inonzwisisika paramita yegineti yekusefa mudziyo, kusefa kwezvimedu zvakakura uye ion kutamisa kushanda zvakanaka kwechinangwa kunogona kuvandudzwa.