Composite coating equipment yemagnetron sputtering uye cathodic multi-arc ion coating inogona kushanda zvakasiyana uye panguva imwe chete;inogona kuiswa uye kugadzirirwa yakachena simbi firimu, simbi inosanganiswa firimu kana composite firimu;inogona kunge iri chidimbu chimwe chete chefirimu uye yakawanda-layer composite firimu.
Zvayakanakira zvinotevera:
Iyo haingosanganisi zvakanakira zvakasiyana-siyana zvekupfeka ion uye inofunga nezve kugadzirira uye kuiswa kwefirimu rakatetepa kune akasiyana siyana ekushandisa, asi zvakare inobvumira dhizaini uye gadziriro yeakawanda-layer monolithic mafirimu kana akawanda-layer composite mafirimu mune imwechete vacuum. coating room panguva imwe chete.
Iko kushandiswa kwemafirimu akaiswa akaiswa anoshandiswa zvakanyanya matekinoroji ayo ari mumhando dzakasiyana siyana, iwo akajairwa anotevera:
(1) Iko kusanganiswa kweiyo isiri-equilibrium magnetron sputtering uye cathodic ion plating tekinoroji.
Chigadzirwa chayo chinoratidzwa sezvinotevera.Icho chigadziro chekuputira midziyo ye columnar magnetron target uye planar cathodic arc ion coating, iyo inokodzera zvose zviri zviviri zvigadziro zvekuputira firimu remusanganiswa uye firimu rekushongedza.Pakupfekedzwa kwezvishandiso, iyo cathodic arc ion coating inotanga kushandiswa kune base layer coating, uye ipapo iyo column magnetron tarisiro inoshandiswa kuisa nitride uye mamwe firimu akaturikidzana kuti awane yakakwirira-chaiyo yekugadzirisa chishandiso pamusoro firimu.
Nekushongedza kwekushongedza, TiN neZrN firimu rekushongedza rinogona kuiswa ne cathodic arc coating kutanga, uyezve doped nesimbi uchishandisa magnetron targets, uye doping effect yakanaka kwazvo.
(2) Mushonga wemapatya plane magnetron uye column cathode arc ion coating techniques.Chigadzirwa chacho chinoratidzwa sezvinotevera.Inoshandiswa iyo yepamusoro twin target tekinoroji, apo maviri padivi-ne-parutivi mapatya akabatanidzwa kune yepakati frequency magetsi ekupa, haingokunda chinangwa chechepfu yeDC sputtering, moto uye zvimwe zvinokanganisa;uye inogona kuisa Al203, SiO2 oxide yemhando yefirimu, kuitira kuti iyo oxidation inopikisa yezvikamu zvakavharwa zvawedzera nekuvandudzwa.Columnar yakawanda-arc chinangwa chakaiswa pakati pekamuri yekutsvaira, iyo inonangwa inogona kushandiswa Ti neZr, kwete chete kuchengetedza mabhenefiti eakakwira akawanda-arc dissociation rate, deposition rate, asi zvakare inogona kunyatso kudzikisa "madonhwe" mukati. maitiro eiyo ndege diki yakawanda-arc target deposition, inogona kuisa uye kugadzirira yakaderera porosity yemafirimu esimbi, makomboni mafirimu.Kana Al naSi vakashandiswa sezvinhu zvinonangwa zvemapatya planar magineti tarisiro akaiswa padhuze, Al203 kana Si0 simbi-ceramic mafirimu anogona kuiswa uye kugadzirirwa.Pamusoro pezvo, ndege diki dzakawanda dzeakawanda-arc evaporation sosi inogona kuisirwa padhuze, uye yainotarirwa zvinhu inogona kunge iri Cr kana Ni, uye mafirimu esimbi uye multilayer composite mafirimu anogona kuiswa uye kugadzirirwa.Naizvozvo, iyi composite coating tekinoroji ndeye composite coating tekinoroji ine akawanda maapplication.
Nguva yekutumira: Nov-08-2022