Vacuum plasma yekuchenesa michina inotora chimiro chakabatanidzwa, chine RF ion yekuchenesa sisitimu, izere otomatiki kudzora, kushanda kuri nyore uye kugadzirisa.
Iyo RF yakakwira-frequency jenareta inogona kuburitsa yakakwira-density plasma, activate, etch uye ashing iyo workpiece pamusoro, inonyatso bvisa guruva uye girisi pachigadzirwa chepamusoro, kusunungura kushushikana kwepamusoro, uye kuwana shanduko dzakasiyana pane yebasa rebasa.
Inoshanda kune rabha, girazi, ceramic, simbi uye zvimwe zvigadzirwa, uye inoshandiswa kune microelectronics, LCD, LED, LCM, PCB redunhu bhodhi, semiconductor packaging, midziyo yekurapa, hupenyu hwesainzi kuedza uye mamwe minda.