Hordhac kooban iyo faa'iidooyinka qalabka dahaarka sputtering magnetron

Mabda'a sputtering Magnetron: electrons isku dhacaan atamka argon habka dardargelinta in substrate hoos falgalka beerta koronto, ionizing tiro badan oo ah argon ions iyo electrons, iyo electrons u duulay substrate ah.Argon-ion-ku wuxuu dardargeliyaa inuu duqeeyo walxaha bartilmaameedka ah ee hoos yimaada ficilka beerta korontada, oo soo saarta tiro badan oo atamka bartilmaameedka ah, kuwaas oo lagu dhejiyo substrate-ka sida atamka bartilmaameedka dhexdhexaadka ah (ama molecules) si loo sameeyo filim.Marka elektarooniga sare uu dardargeliyo inuu u duulo substrate-ka, iyadoo ay saameyn ku leedahay xoogga Lorentz ee goobta magnetic, waxay soo bandhigaysaa qaab isku dhafan oo wareeg ah iyo cycloid si ay u sameeyaan dhaqdhaqaaq wareeg ah oo isdaba-joog ah oo ku yaal dusha bartilmaameedka.Elektaroonigu ma aha oo kaliya in uu leeyahay waddo dheer oo dhaqdhaqaaq ah, Waxa uu weli ku yaalaa aagga balaasmaha ee u dhow dusha bartilmaameedka by theory field electromagnetic, kaas oo qadar badan oo Ar ah oo ionized ah si loo duqeeyo bartilmaameedka, sidaas darteed heerka kaydinta magnetron Qalabka dahaarka candhuufta ayaa sarreeya.

Sidaas darteed, aqalabka daahan sputtering magnetronayaa la soo saaray, kaas oo isku daraya sputtering magnetron iyo tignoolajiyada daahan ion, oo bixisa xal hagaajinta joogteynta midabka iyo https://www.zhenhuavac.com/wp-admin/post.php?post=5107&action=edit&message=1# xasiloonida heerka dhigaalka iyo isku dhafka ka kooban.Marka loo eego shuruudaha badeecada kala duwan, nidaamka kuleylka, nidaamka eexda, nidaamka ionization iyo aaladaha kale ayaa la dooran karaa.Qaybinta bartilmaameedka ayaa si dabacsan loo hagaajin karaa, iyo isku-duubnaanta filimku waa ka sarreeyaa.Qalabka bartilmaameedka ah ee kala duwan, filim isku dhafan oo leh waxqabad wanaagsan ayaa la diyaarin karaa.Dahaarka ay diyaariyeen qalabku wuxuu leeyahay faa'iidooyinka xoogga isku dhafan ee xooggan iyo isugeynta, kaas oo si wax ku ool ah u hagaajin kara caabbinta buufinta milixda, xirto caabbinta iyo adkaanta dusha sare ee alaabta, oo buuxisa shuruudaha diyaarinta daahan waxqabadka sare leh.
Qalabku waxa uu qani ku yahay agabka lagu dabaqi karo, kuwaas oo loo isticmaali karo birta aan birta lahayn ee biyaha ku dahaadhan qalabka/qaybaha balaastikada ah, dhalooyinka, dhoobada iyo agabka kale.Inta badan waxaa loo isticmaalaa qalabka elektarooniga ah ee alaabta elektiroonigga ah, saacadaha sare iyo saacadaha, dahabka aadka u sarreeya iyo qalabka alaabada hargaha ah iyo alaabada kale ee hodanka ah.