① Xakamaynta wanaagsan iyo ku celcelinta dhumucda filimka
Haddii dhumucda filimka lagu xakameyn karo qiime horay loo sii go'aamiyay waxaa loo yaqaannaa xakamaynta dhumucda filimka.Dhumucda filimka loo baahan yahay ayaa lagu soo celin karaa marar badan, taas oo loo yaqaanno dhumucda filimka soo noqnoqdaSidaa darteed, dhumucda filimka suufka ah waa la xakameyn karaa, filimka leh dhumucdiisuna hore ayaa loo dhigi karaa si kalsooni leh.Intaa waxaa dheer, dahaarka sputter-ku wuxuu heli karaa filim leh dhumuc labis ah oo dusha sare ah.
② Ku dhajinta adag ee u dhaxaysa filimka iyo substrate-ka
Tamarta atamka la daadiyey waa 1-2 amar oo ka sarreeya ta atamka la uumimay.Beddelka tamarta tamarta sare ee atamka tamarta leh ee lagu shubo substrate-ka ayaa aad uga sarreeya kan atamka la uumibixiyey, kaas oo dhaliya kulayl sare oo kor u qaadaya isku-xidhka u dhexeeya atamka miiray iyo substrate-ka.Intaa waxaa dheer, qaar ka mid ah atamka tamarta sare leh ayaa soo saara heerar kala duwan oo duritaan ah, iyaga oo samaynaya lakabka pseudodiffusion ee substrate-ka.Intaa waxaa dheer, substrate-ka ayaa had iyo jeer la nadiifiyaa oo lagu hawlgeliyaa gobolka plazma inta lagu jiro habka sameynta filimka, kaas oo ka saaraya atomyada sputtering leh adhesion daciif ah, oo nadiifiya oo dhaqaajiya dusha sare ee substrate.Sidaa darteed, filimka sputtered wuxuu leeyahay adhesion xoog leh substrate-ka.
③ Filim cusub oo ka duwan bartilmaameedka ayaa la diyaarin karaa
Haddii gaas falgal ah la soo bandhigo inta lagu jiro sputtering si ay uga falceliso bartilmaameedka, filim cusub oo ka duwan bartilmaameedka ayaa la heli karaa.Tusaale ahaan, silikoon ayaa loo isticmaalaa sidii bartilmaameedka firirka, iyo ogsijiinta iyo argon ayaa la gelinayaa qolka faakuumka.Ka dib marka la tufo, filimka dahaarka ee SiOz waa la heli karaa.Isticmaalka titanium sida bartilmaameedka sputtering, nitrogen iyo argon ayaa la gelinayaa qolka faakuumka si wadajir ah, iyo wajiga TiN dahab u eg filim ayaa la heli karaa ka dib markii sputtering.
④ Nadiifin sare iyo tayada wanaagsan ee filimka
Maaddaama aysan jirin wax qallafsan oo ka mid ah qalabka diyaarinta filimka sputtering, qaybaha qalabka kuleyliyaha laguma qasi doono lakabka filimka sputtering.Khasaaraha dahaarka sputtering ayaa ah in xawaaraha samaynta filimku uu ka gaabinayo dahaarka uumiga, heerkulka substrate-ka ayaa ka sarreeya, way fududahay in la saameeyo gaaska wasakhaysan, qaab dhismeedka qalabkuna waa ka sii adag yahay.
Maqaalkan waxaa daabacay Guangdong Zhenhua, soo saarahaqalabka daahan vacuum
Waqtiga boostada: Mar-09-2023