Habka dahaarka godan ee cathode ion waa sida soo socota:
1. Ku rid Chin ingots burburka.
2. Kordhinta qalabka shaqada.
3. Ka dib markii daadgureynta si 5 × 10-3Pa, gaaska argon waxaa lagu soo bandhigay qolka daahan ka tube lacagta, iyo heerka vacuum waa agagaarka 100Pa.
4. Daar awoodda eexda.
5. Ka dib markii uu shido awoodda arc si ay u shido dheecaanka cathode godan Dheecaan, Dheecaan dhalaalaya oo sarreeya cufnaanta hadda, Cufnaanta sare ee ions jiirka ee tuubada qalinku waxay garaacdaa derbiga tuubada vantage, Samee gidaarka tuubada si dhakhso ah u diirran si ay u sii daayaan qulqulka elektaroonigga ah, qaabka dheecaanka ka imanaya qulqulka dhalaalka isbeddel lama filaan ah Dheecaan arc, Voltage waa 40 ~ 70V, Hadda waa 80 ~ 300A. heerkulka tube Silver gaadho kor ku xusan 2300K, Incandescent, Sii daaya qulqulka cufnaanta sare ee arc electrons ka tuubada, iyo toogtay si anode ah.
6. Hagaajinta heerka vacuum. Heerka vacuum ee dheecaanka dhalaalaysa ka gun cathode godan ku saabsan yahay 100 Pa, Oo degree vacuum ee daahan waa 8 × 10-1 ~ 2Pa.Sidaas darteed, ka dib shido ee dheecaanka arc, Yaree argon soo socda gaaska sida ugu dhaqsaha badan, Ku hagaaji heerka faakuumka ilaa xad ku habboon dahaarka.
7, Titanium dahaadhay salka lakabka.Electron socodka gal bir anodically burburay Chin ingot, Beddelka tamarta kinetic in tamarta kulaylka, Uumi biraha Chin by kululaynta, atamka uumiga gaadho workpiece ah si ay u sameeyaan filim titanium ah.
8, Deposition of gaaska TiN.Nitrogen waxaa la siiyaa qolka daahan, gaaska Nitrogen iyo atamka uumi baxay waxaa ionized galay nitrogen iyo ion titanium.Above crucible ah, itimaalka sare ee shilalka inelastic ee atamka uumiga titanium la durdurrada cufan ee electrons tamarta hooseeya, Heerka kala-soocidda birta waa sida ugu sarreeya 20% ~ 40%, ion Titanium waxay u badan tahay inay falcelin kiimikaad ah la yeelato nitrogen gaaska fal-celinta, Deposition si aad u hesho lakabka filimka nitride mantle. Gun cathode-ka bannaan waa labadaba il kale oo uumiga Inta lagu jiro daahan, The hadda ee gariiradda electromagnetic ku wareegsan crucible waa in sidoo kale la hagaajiyo, Diirada elektarooniga ah ilayska xarunta burburka,Sidaa darteed, cufnaanta awoodda socodka elektarooniga ah ayaa kordhay.
9. Power Off.Ka dib markii dhumucdiisuna waxay filimka gaadho dhumucdiisuna waxay hore u filimka, Demi sahayda arc, sahayda korantada eexda iyo sahayda hawada.
Waqtiga boostada: Jul-08-2023