Vacuum magnetron sputtering waxay si gaar ah ugu habboon tahay dahaarka dhigaalka firfircoon.Dhab ahaantii, habkani wuxuu kaydin karaa filimada khafiifka ah ee wax kasta oo oxide, carbide, iyo nitride ah.Intaa waxaa dheer, geeddi-socodku sidoo kale wuxuu si gaar ah ugu habboon yahay dhigista qaababka filimka multilayer, oo ay ku jiraan naqshadaha indhaha, filimada midabka, dahaarka xirashada u adkaysta, nano-laminates, daahan superlatice, filimada dahaarka, iwm Horraantii 1970, filim muuqaal ah oo tayo sare leh. tusaalooyin dhigista ayaa loo sameeyay noocyo kala duwan oo ah qalabka lakabka filimka indhaha.Agabkaan waxaa ka mid ah walxaha korantada ee hufan, semiconductors, polymers, oxides, carbides, iyo nitrides, halka fluoride loo isticmaalo hababka sida daahan uumiga.
Faa'iidada ugu weyn ee geeddi-socodka sputtering magnetron waa iyadoo la isticmaalayo hababka daahan reactive ama non-reactive in lagu shubo lakabyada ka mid ah qalabkan iyo si fiican u xakameeyo ka kooban lakabka, dhumucdiisuna filimka, lebbiska film dhumucdiisuna waxay iyo sifooyinka farsamo ee lakabka.Nidaamku wuxuu leeyahay sifooyinka soo socda.
1. Heerka dhigaalka weyn.Sababtoo ah isticmaalka xawaaraha sare ee magnetron electrodes, qulqulka ion weyn ayaa la heli karaa, si wax ku ool ah u wanaajiya heerka dhigaalka iyo heerka qulqulka habka daahan.Marka la barbar dhigo hababka kale ee daahan daahan, magnetron sputtering waxay leedahay awood sare iyo dhalidda sare, waxaana si ballaaran loo isticmaalaa in wax soo saarka warshadaha kala duwan.
2. Waxtarka awoodda sare.Bartilmaameedka sputtering Magnetron guud ahaan dooran danab gudahood kala duwan ee 200V-1000V, sida caadiga ah waa 600V, sababtoo ah danab ee 600V waa uun gudahood heerka ugu sarreeya ee waxtarka koronto.
3. Tamar xafid hooseeysa.Korantada bartilmaameedka magnetron ayaa lagu dabaqaa hooseeya, goobta magnetic waxay xaddidaysaa balasmaha u dhow cathode, taas oo ka hortagaysa walxaha tamarta sare leh inay u soo baxaan substrate-ka.
4. Heerkulka substrate hoose.Anode-ka waxaa loo isticmaali karaa in lagu hago electrons-ka soo baxa inta lagu jiro dheecaanka, looma baahna taageerada substrate si loo dhamaystiro, taas oo si wax ku ool ah u yareyn karta bamka elektaroonigga ah ee substrate-ka.Sidaa darteed heerkulka substrate-ku wuu hooseeyaa, kaas oo aad ugu habboon qaar ka mid ah substrate-ka caagga ah ee aan aad ugu adkaysan karin daahan heerkulka sare.
5, Magnetron sputtering bartilmaameedka dusha sare etching ma aha labis.Magnetron sputtering bartilmaameedka dusha sare ee etching aan sinnayn waxaa sababa goobta birlabeedka aan sinnayn ee bartilmaameedka.Meesha heerka la beegsanayo bartilmaameedku waa ka weyn yahay, si heerka ka faa'iidaysiga wax ku oolka ah ee bartilmaameedku u yahay mid hooseeya (kaliya 20-30% heerka isticmaalka).Sidaa darteed, si loo hagaajiyo isticmaalka bartilmaameedka, qaybinta magnetic field waxay u baahan tahay in la beddelo habab gaar ah, ama isticmaalka magnets ee ku socda cathode ayaa sidoo kale hagaajin kara isticmaalka bartilmaameedka.
6. Bartilmaameedka isku dhafan.Waxay samayn kartaa filim daahan oo isku dhafan.Waqtigan xaadirka ah, isticmaalka habka isku-dhafka magnetron-ka ee habka sputtering bartilmaameedka ayaa si guul leh loogu dahaadhay Ta-Ti alloy, (Tb-Dy)-Fe iyo Gb-Co filimka daawaha ah.Qaab dhismeedka bartilmaameedka isku dhafan wuxuu leeyahay afar nooc, siday u kala horreeyaan, waa bartilmaameedka wareega, bartilmaameedka labajibbaaran, bartilmaameedka afar geesoodka yar iyo bartilmaameedka qaybta.Isticmaalka qaybta qaab-dhismeedka bartilmaameedka ah ayaa ka wanaagsan.
7. Codsiyada ballaaran.Habka sputtering Magnetron wuxuu kaydin karaa walxo badan, kuwa caadiga ah waa: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti , Zr, SiO, AlO, GaAs, U, W, SnO, iwm.
Tuurista Magnetron waa mid ka mid ah hababka daahan ee ugu ballaaran ee loo isticmaalo si loo helo filim tayo sare leh.Iyadoo cathode cusub, waxay leedahay ka faa'iidaysiga bartilmaameedka sare iyo heerka dhigaalka sare.Guangdong Zhenhua Technology vacuum magnetron geeddi-socodka daahan sputtering hadda waxaa si ballaaran loo isticmaalaa in daahan ee substrates-aagga weyn.Habka looma isticmaalo oo kaliya in lagu dhejiyo hal lakab oo filim ah, laakiin sidoo kale daahan filimo badan oo lakab ah, marka lagu daro, waxaa sidoo kale loo isticmaalaa duubista si loo duubo habka loogu talagalay filimka baakadaha, filimka indhaha, lamination iyo daahan kale oo filim ah.
Waqtiga boostada: Nov-07-2022