Geedi socodka ee daahan cathodic arc isha ion asal ahaan waa isku mid sida tiknoolijiyada kale ee daahan, iyo qaar ka mid ah hawlaha sida rakibidda workpieces iyo vacuuming aan mar dambe soo noqnoqda.
1.Nadiifinta bamka ee qalabka shaqada
Kahor dahaarka, gaaska argon waxaa lagu soo bandhigaa qolka dahaarka leh faaruq ah 2 × 10-2Pa.
Daar sahayda korantada eexda garaaca wadnaha, oo leh wareeg shaqo oo ah 20% iyo eexda shaqada ee 800-1000V.
Marka quwadda arc la shido, waxaa abuurma dareere bannaan oo qabow, kaas oo soo saara xadiga elektarooniga ah ee hadda jira iyo ion titanium oo ka imanaya isha arc, samaynta balaasmaha cufnaanta sare leh.ion titanium ayaa dedejisaa ay duritaanka galay workpiece ka yar cadaadiska eexda sare taban codsatay in ay workpiece ah, duqaynta iyo sputtering gaaska haraaga ah iyo wasakhda adsorbed dusha workpiece ah, iyo nadiifinta iyo nadiifinta dusha workpiece ah;Isla mar ahaantaana, gaaska chlorine ee qolka daahan waxaa ionized by electrons, iyo argon ions dardar duqaynta ee dusha workpiece.
Sidaa darteed, saamaynta nadiifinta duqaynta ayaa wanaagsan.Kaliya qiyaastii 1 daqiiqo oo nadiifinta bamka ayaa nadiifin karta qaybta shaqada, taas oo loo yaqaan "bamka weyn ee arc".Sababtoo ah tirada sare ee ions titanium, haddii il yar oo arc ah loo isticmaalo in lagu duqeeyo oo lagu nadiifiyo shaqada muddo dheer, heerkulka shaqada ayaa u nugul kulaylka, iyo cidhifka qalabku wuxuu noqon karaa mid jilicsan.Guud ahaan wax-soo-saarka, ilaha yar-yar ayaa mid mid kor ilaa hoos loogu shideeyaa, il kasta oo yar oo yarna waxa ay leedahay wakhti nadiifin duqayn ah oo ku dhow 1 daqiiqo.
(1) Dahaarka hoose ee titanium
Si loo hagaajiyo ku-xidhka u dhexeeya filimka iyo substrate-ka, lakabka substrate titanium saafiga ah ayaa badanaa la dahaadhay ka hor inta aan la damin titanium nitride.Hagaajin heerka faakuumka ilaa 5 × 10-2-3 × 10-1Pa, hagaaji korantada eexda workpiece ilaa 400-500V, oo hagaaji wareegga waajibaadka ee sahayda tamarta garaaca wadnaha ilaa 40% ~ 50%.Wali shidinaya ilo yar yar oo mid mid ah si ay u dhaliso qulqulka qulqulka beerta qabow.Sababo la xiriira hoos u dhac ku yimid danab eexashada taban ee workpiece, tamarta ee ions titanium hoos u dhaco.Ka dib markii la gaaro workpiece ah, saamaynta sputtering waa ka yar saamaynta dhigaalka, iyo lakabka kala guurka titanium ayaa la sameeyay on workpiece si loo hagaajiyo xoogga isku xidhka u dhexeeya titanium nitride lakabka filim adag iyo substrate ah.Habkani sidoo kale waa habka kululaynta workpiece.Marka bartilmaameedka titanium-ka saafiga ah la sii daayo, iftiinka balasmaha waa buluug buluug ah.
1.Ammoniated baaquli adag oo daahan filim
Ku hagaaji heerka faakuumka 3×10-1-5Pa, hagaaji korantada eexda workpiece ilaa 100-200V, oo hagaajin wareegga waajibaadka sahayda tamarta garaaca wadnaha ilaa 70% ~ 80%.Ka dib markii nitrogen la soo saaro, titanium waa falcelin isku dhafan oo leh balaasmaha dheecaanka arc si loo dhigo titanium nitride filim adag.Halkaa marka ay marayso, iftiinka balasmaha ee qolka faakuumka waa casaan cherry.Haddii C2H2, O2, iwm waa la soo bandhigay, TiCN, TiO2, iwm lakabyada filimka ayaa la heli karaa.
-Maqaalkan waxaa sii daayay Guangdong Zhenhua, asoo saaraha mashiinka daahan vacuum
Waqtiga boostada: Jun-01-2023