1. Mochini oa ho hloekisa plasma oa vacuum o ka thibela basebelisi ho hlahisa khase e kotsi 'meleng oa motho nakong ea ho hloekisa le ho qoba ho hlatsoa lintho.
2. Ntho ea ho hloekisa e omisitsoe ka mor'a ho hloekisa plasma, 'me e ka romeloa ts'ebetsong e latelang ntle le phekolo e eketsehileng ea ho omisa, e ka finyellang katleho ea ts'ebetso ea mohala oohle oa tlhahiso;
3. Ho hloekisa plasma ho ka ntlafatsa haholo ts'ebetso ea ho hloekisa.Ts'ebetso eohle ea ho hloekisa e ka phethoa ka metsotso e seng mekae, kahoo e na le litšobotsi tsa chai e ngata;
4. Amohela ho hloekisa plasma ho qoba lipalangoang, polokelo, ho ntša le mehato e meng ea phekolo ea mokelikeli oa ho hloekisa, e le ho boloka sebaka sa tlhahiso se hloekile ebile se hloekile;
5. Ka mor'a ho hloekisa le ho senya, ts'ebetso ea holim'a thepa ka boeona e boetse e lokela ho ntlafatsoa.Ka mohlala, ho bohlokoa haholo ho ntlafatsa metsi a holim'a metsi le ho khomarela filimi lits'ebetsong tse ngata.
Ho hloekisa plasma ho ka tšoara mefuta eohle ea lisebelisoa, litšepe, li-semiconductors, oxides, kapa lisebelisoa tsa polymer (joalo ka polypropylene, polyvinyl chloride, polytetrafluoroethylene, polyimide, polyester, epoxy resin, le li-polymers tse ling) ho sa tsotelehe ntho ea kalafo.Ka hona, e loketse ka ho khetheha bakeng sa lisebelisoa tse sa tsitsang mocheso kapa li-solvents.
Ho phaella moo, mohaho oohle, karolo kapa o rarahaneng oa thepa o ka boela oa hloekisoa ka mokhoa o khethehileng.
Nako ea poso: Feb-02-2023