① Ho laola hantle le ho pheta-pheta ha botenya ba filimi
Hore na botenya ba filimi bo ka laoloa ka boleng bo reriloeng esale pele bo bitsoa taolo ea botenya ba filimi.Botenya ba filimi bo hlokahalang bo ka phetoa ka makhetlo a mangata, e bitsoang filimi botenya repeatability.Because ho qhala hona joale le shebiloeng hona joale ea vacuum sputtering barbotage ka laoloa ka thoko.Ka hona, botenya ba filimi e hlabang bo khona ho laoleha, 'me filimi e nang le botenya bo reriloeng esale pele e ka behoa ka botšepehi.Ho phaella moo, ho roala sputter ho ka fumana filimi e nang le botenya bo lekanang holim'a sebaka se seholo.
② Ho khomarela ka matla pakeng tsa filimi le substrate
Matla a liathomo tse fahlang ke liodara tse 1-2 tsa boholo ho feta tsa liathomo tse fetohileng mouoane.Phetoho ea matla ea liathomo tse phatlohileng ka matla a phahameng a behiloeng holim'a substrate e phahame haholo ho feta ea liathomo tse e-eang mouoane, e leng se hlahisang mocheso o phahameng le ho matlafatsa ho khomarela pakeng tsa liathomo tse fafalitsoeng le substrate.Ho feta moo, liathomo tse ling tse nang le matla a phahameng a phatlohileng li hlahisa likhato tse fapaneng tsa ente, li etsa lera la pseudodiffusion holim'a substrate.Ho phaella moo, substrate e lula e hloekisoa 'me e kenngoa sebakeng sa plasma nakong ea filimi ea ho etsa filimi, e tlosang liathomo tsa sputtering ka ho khomarela ho fokolang, le ho hloekisa le ho kenya letsoho holim'a metsi.Ka hona, filimi ea sputtered e na le sekhomaretsi se matla ho substrate.
③ Filimi e ncha e fapaneng le sepheo e ka lokisoa
Haeba khase e sebetsang e hlahisoa nakong ea sputtering ho etsa hore e sebetsane le sepheo, filimi e ncha e fapaneng ka ho feletseng le sepheo e ka fumanoa.Ka mohlala, silicon e sebelisoa e le sepheo sa ho fafatsa, 'me oksijene le argon li kenngoa ka kamoreng ea vacuum hammoho.Ka mor'a ho sputtering, filimi ea SiOz e sireletsang e ka fumanoa.Ho sebelisoa titanium e le sepheo sa ho fafatsa, naetrojene le argon li kenngoa ka kamoreng ea vacuum hammoho, 'me filimi e kang ea khauta ea TiN e ka fumanoa ka mor'a ho fafatsa.
④ Bohloeki bo phahameng le boleng bo botle ba filimi
Kaha ha ho na karolo ea crucible ho sesebelisoa sa ho lokisetsa filimi ea sputtering, likarolo tsa lisebelisoa tsa heater crucible li ke ke tsa kopanngoa ka lera la filimi ea sputtering.Melemo ea ho roala ha sputtering ke hore lebelo la ho etsa filimi le lieha ho feta la ho roala mouoane, mocheso oa substrate o phahame, ho bonolo ho angoa ke khase e sa hloekang, 'me mohaho oa mochine o rarahane haholoanyane.
Sengoliloeng sena se hatisitsoe ke Guangdong Zhenhua, moetsi oalisebelisoa tsa ho roala ka vacuum
Nako ea poso: Mar-09-2023