Ts'ebetso ea ho roala ion ea cathode e sekoti ke e latelang:
1, Kenya li-ingots tsa Chin ho putlama.
2. Ho phahamisa sesebedisoa.
3, Ka mor'a ho falla ho 5 × 10-3Pa, khase ea argon e kenngoa ka kamoreng ea ho roala ho tloha ka tube ea silevera, 'me boemo ba vacuum bo pota-potile 100Pa.
4. Bulela matla a leeme.
5, Ka mor'a ho bulela matla a arc ho hotetsa phallo ea cathode e se nang letho. Phallo e khanyang e hlahisoa ka har'a tube ea konopo, Discharge voltage ke 800 ~ 1000V, The arc-rasing current ke 30~50A.Ka lebaka la phello e sekoti ea cathode ea khanya. ho tsoa, khanya e phahameng ea khanya ea hona joale, Boima bo phahameng ba li-ion tsa litoeba ka har'a li-tube tsa silevera li phunya lebota la tube ea vantage, Etsa hore lebota la tube le futhumale ka potlako ho fihlela phallo ea elektronike, mokhoa oa ho tsoa ho tsoa ho khanya o fetoha ka tšohanyetso arc discharge,Voltage ke 40 ~ 70V,Hona joale ke 80~300A.Silver tube mocheso o fihla ka holimo ho 2300K,Incandescent,E ntša leqhubu le phahameng la li-electrone tsa arc ho tloha tube,' me li thunngoa ho anode.
6、 Phetoho ea boemo ba vacuum. Boemo ba vacuum bakeng sa ho ntša khanya ho tloha sethunya sa cathode se sekoti ke hoo e ka bang 100 Pa, 'me tekanyo ea vacuum ea ho roala ke 8×10-1 ~ 2Pa.Ka hona, Ka mor'a ho khantša ho tsoa ha arc, Fokotsa argon e kenang. khase kapele kamoo ho ka khonehang, Fetola boemo ba vacuum ho mefuta e loketseng ho roala.
7, Titanium plated base layer.Elektrone e phalla holim'a sesebelisoa sa tšepe se sothehileng ka mokhoa o sa tloaelehang, Phetoho ea matla a kinetic ho matla a futhumetseng, Mouoane oa Chin tšepe ka ho futhumatsa, liathomo tsa Mouoane li fihla ho workpiece ho etsa filimi ea titanium.
8, Khase ea TiN. Nitrogen e fanoa ka kamoreng ea ho roala, khase ea Nitrogen le liathomo tse fetohang mouoane li kenngoa ka ionized ho naetrojene le li-ion tsa titanium. Ka holim'a crucible, menyetla e phahameng ea ho thulana ha inelastic ea liathomo tsa mouoane tsa titanium tse nang le melapo e teteaneng ea lielektrone tse fokolang matla, Sekhahla sa ho arohana ha tšepe se ka holimo ho 20% ~ 40%., Li-ion tsa Titanium li na le menyetla e mengata ea ho itšoara ka lik'hemik'hale ka khase e arabelang naetrojene, Deposition ho fumana lera la filimi ea nitride. ea ionization.Nakong ea ho roala, Hona joale ea coil ea motlakase ho pota-pota crucible e boetse e lokela ho lokisoa,Sheba lebone la elektronike ho ea bohareng ba ho putlama, Ka hona, matla a matla a phallo ea elektronike a eketseha.
9 、 Power Off
Nako ea poso: Jul-08-2023