Nakong ea ho roala mouoane, nucleation le kholo ea lera la filimi ke motheo oa theknoloji e fapaneng ea ho roala ion
1. Nucleation
Intheknoloji ea ho roala mouoane oa vacuum, ka mor'a hore likaroloana filimi lera ba mouoane ho tloha mohloling oa mouoane ka sebōpeho sa liathomo, ba fofa ka ho toba workpiece ka vacuum phahameng 'me ba theha lera filimi ka nucleation le kgolo holim'a workpiece.Nakong ea moea oa vacuum, matla a liathomo tsa lera la filimi a balehang mohloling oa mouoane a ka ba 0.2eV.Ha momahano pakeng tsa likaroloana tsa lera filimi e kholo ho feta matla a tlamahano pakeng tsa liathomo tsa lera filimi le workpiece, theha khubu ea sehlekehleke.Athomo e le 'ngoe ea filimi e lula holim'a mosebetsi ka nako e telele e etsa motsamao o sa tsitsang, ho hasana, ho falla, kapa ho thulana le liathomo tse ling ho theha lihlopha tsa athomo. khubu e thehoa, e bitsoang nucleus e bōpehileng joaloka homogeneous.
boreleli, 'me e na le mefokolo le mehato e mengata, e bakang phapang ea matla a adsorption ea likarolo tse fapaneng tsa mosebetsi ho liathomo tsa radioactive.Matla a adsorption a holim'a sekoli a maholo ho feta a sebaka se tloaelehileng, kahoo e fetoha setsi se sebetsang, se loketseng nucleation e khethehileng, e bitsoang heterogeneous nucleation.Ha matla a kopantsoeng a lekana le matla a tlamang, kapa matla a tlamang pakeng tsa liathomo tsa lera le workpiece e kholo ho feta matla a kopantsoeng pakeng tsa liathomo tsa lera, sebopeho sa lamellar se thehoa.Ho thekenoloji ea ion plating, setsi sa sehlekehleke se thehoa maemong a mangata.
2.Khōlo
Hang ha mokokotlo oa filimi o thehoa, o tsoela pele ho hōla ka ho tšoasa liathomo tsa ketsahalo.Lihlekehleke tsena lia hōla 'me li kopana hammoho ho etsa li-hemispheres tse khōloanyane, butle-butle li etsa lera la sehlekehleke sa hemispherical se hasang holim'a sebaka sa mosebetsi.
Ha matla a athomo a lera la filimi a phahame, a ka hasana ka ho lekaneng holim'a metsi 'me filimi e boreleli e tsoelang pele e ka thehoa ha lihlopha tse tlang tsa athomo tse tlang li nyenyane.Haeba ho ata ha liathomo holim'a metsi ho fokola le boholo ba lihlopha tse kentsoeng li kholo, li teng e le li-nuclei tse kholo tsa peninsular. Karolo e ka holimo ea sehlekehlekeng sa mantlha e na le phello e matla ea moriti karolong ea concave, e leng "phello ea moriti". le khōlo e khethehileng, e hlahisang tekanyo e ntseng e eketseha ea concavity holim'a metsi ho etsa likristale tsa conical kapa columnar tsa boholo bo lekaneng.Li-voids tse phunyeletsang li thehoa pakeng tsa likristale tsa conical le boleng ba boleng bo holimo bo ntseng bo eketseha.
Nako ea poso: May-24-2023