Ts'ebetso ea ho roala li-ion tsa cathodic arc e hlile e ts'oana le mahlale a mang a ho roala, 'me lits'ebetso tse ling tse kang ho kenya lisebelisoa tsa ho sebetsa le vacuum ha li sa phetoa.
1.Bombardment hloekisa ea workpieces
Pele o roala, khase ea argon e kenngoa ka kamoreng ea ho roala ka vacuum ea 2 × 10-2Pa.
Bulela phepelo ea matla a pulse bias, ka potoloho ea mosebetsi ea 20% le leeme la mosebetsi oa 800-1000V.
Ha matla a arc a buletsoe, ho hlahisoa sebaka se batang sa arc light discharge, se hlahisang palo e kholo ea elektronike hona joale le titanium ion hona joale ho tloha mohloling oa arc, ho etsa plasma e phahameng haholo.Titanium ion potlakisa ente ea eona ka workpiece tlas'a khatello e mpe e phahameng leeme sebelisoa ho workpiece, bombarding le sputtering masala khase le litšila adsorbed holim'a workpiece, le ho hloekisa le ho hloekisa holim'a workpiece;Ka nako e ts'oanang, khase ea chlorine ka kamoreng ea ho roala e entsoe ka ionized ke li-elektronike, 'me li-ion tsa argon li potlakisa ho phatloha ha libomo tsa sebaka sa mosebetsi.
Ka hona, phello ea ho hloekisa bombardment e ntle.Ke motsotso o le mong feela oa ho hloekisa libomo o ka hloekisang mosebetsi, o bitsoang "main arc bombardment".Ka lebaka la boima bo phahameng ba li-ion tsa titanium, haeba mohloli o monyenyane oa arc o sebelisetsoa ho bomola le ho hloekisa mosebetsi oa nako e telele haholo, mocheso oa workpiece o atisa ho chesa haholo, 'me moeli oa sesebelisoa o ka ba bonolo.Ka kakaretso tlhahiso, mehloli e menyenyane ea li-arc e buloa ka bonngoe ho tloha holimo ho ea tlase, 'me mohloli o mong le o mong o monyenyane oa arc o na le nako ea ho hloekisa ea bombardment e ka bang motsotso o le mong.
(1) Ho koahela lera le ka tlase la titanium
E le ho ntlafatsa ho khomarela pakeng tsa filimi le substrate, lesela la titanium substrate e hloekileng hangata le koahetsoe pele ho roala titanium nitride.Fetola boemo ba vacuum ho 5 × 10-2-3 × 10-1Pa, fetola voltage ea leeme la workpiece ho 400-500V, 'me u fetole potoloho ea mosebetsi oa phepelo ea matla a pulse leeme ho 40% ~ 50%.E ntse e hotetsa mehloli e menyenyane ea li-arc ka bonngoe ho hlahisa phallo ea metsi a batang.Ka lebaka la ho fokotseha ha voltage e mpe ea leeme la sesebelisoa, matla a li-ion tsa titanium a fokotseha.Ka mor'a ho fihla workpiece, phello ea sputtering e ka tlaase ho phello ea deposition, 'me ho thehoa lera la phetoho ea titanium holim'a workpiece ho ntlafatsa matla a ho kopanya pakeng tsa titanium nitride hard film layer le substrate.Ts'ebetso ena e boetse e le mokhoa oa ho futhumatsa mochini oa mosebetsi.Ha sepheo se hloekileng sa titanium se ntšoa, leseli le plasma le ba boputsoa ba azure.
1.Ammoniated sekotlolo se thata sa filimi ea ho roala
Fetola boemo ba vacuum ho 3 × 10-1-5Pa, fetola voltage ea leeme la workpiece ho 100-200V, 'me u fetole potoloho ea mosebetsi oa phepelo ea matla a pulse bias ho 70% ~ 80%.Kamora hore naetrojene e hlahisoe, titanium ke karabelo e kopaneng le arc discharge plasma ho kenya filimi e thata ea titanium nitride.Ka nako ena, leseli la plasma ka phaposing ea vacuum ke bofubelu ba cherry.Haeba C2H2, O2, joalo-joalo lia hlahisoa, TiCN, TiO2, joalo-joalo lihlopha tsa lifilimi li ka fumanoa.
-Sengoloa sena se lokollotsoe ke Guangdong Zhenhua, amoetsi oa mochini oa ho roala ka vacuum
Nako ea poso: Jun-01-2023