Theho roala ka vacuummochine o arotsoe ka: vacuum evaporation barbotage, vacuum sputtering barbotage le vacuum ion barbotage.
1. Koahelo ea mouoane oa Vacuum
Tlas'a boemo ba vacuum, etsa lintho tse bonahalang evaporated, tse kang tšepe, tšepe motsoako, joalo-joalo ebe beha bona holim'a substrate holim'a metsi, e le mouoane barbotage mokhoa hangata sebelisa ho hanyetsa futhumatsang, 'me joale elektrone Beam bombardment ea thepa barbotage, etsa hore ba. e ile ea fetoha mouoane mokhahlelong oa khase, ebe e beha sebakeng sa substrate, nalane, vacuum vapor deposition ke theknoloji ea pejana e neng e sebelisoa mokhoeng oa PVD.
2. Ho roala ha metsi
Khase e ts'oaroa ka tlas'a (Ar)-e tletseng maemo a vacuumKa nako ena liathomo tsa argon (Ar) li kena ka har'a li-ion tsa naetrojene (Ar), li-ion li potlakisoa ke matla a lebala la motlakase, 'me li hlasela sepheo sa cathode. E entsoe ka thepa ea ho roala, sepheo se tla hlajoa ebe se behoa holim'a substrate Li-ion tsa ketsahalo tse koahetsoeng ka sputter, hangata li fumanoa ka ho ntša metsi a khanyang, li pakeng tsa 10-2pa ho ea ho 10Pa, Kahoo ho bonolo ho thulana le likaroloana ka limolek'hule tsa khase ka phaposing ea vacuum ha e fofa e lebile substrate, e etsa hore tataiso ea motsamao e be e sa reroang le filimi e kentsoeng habonolo.
3, ho roala ion
Tlas'a maemo a vacuum, tlas'a boemo ba vacuum, ho sebelisoa mokhoa o itseng oa plasma ionisation ho etsa athomo ea ho roala hore e be li-ion. li kenngoa holim'a substrate tlas'a leeme le tebileng le lebe ho etsa filimi e tšesaane.
Nako ea poso: Mar-23-2023