Resistance evaporation source coating ke mokhoa oa mantlha oa ho koahela mouoane oa vacuum."Evaporation" e bolela mokhoa o mosesaane oa ho lokisa filimi eo ho eona thepa ea ho roala ka phaposing ea vacuum e futhumatsang le ho fetoha mouoane, e le hore liathomo kapa limolek'hule tsa lintho tse bonahalang li fetohe mouoane ebe li tsoa ka holim'a metsi, ho etsa ketsahalo ea phallo ea mouoane holim'a metsi. substrate kapa substrate, 'me qetellong e koaletsoe ho etsa filimi e tiileng.
Seo ho thoeng ke ho hanyetsa evaporation mohloli oa ho roala mokhoa ke ho sebelisa tantalum, molybdenum, tungsten le litšepe tse ling tse phahameng tse qhibilihisang ho etsa sebopeho se loketseng sa mohloli oa mouoane, o jereng thepa e lokelang ho etsoa mouoane, lumella moea hore o phalle, mocheso ka ho toba le mouoane lintho tse entsoeng mouoane, kapa beha lisebelisoa tse lokelang ho fetoloa mouoane ho alumina, beryllium oxide le li-crucibles tse ling bakeng sa ho futhumatsa ka tsela e sa tobang le mouoane.Ona ke mokhoa oa ho hanyetsa mocheso oa moea oa mouoane.
Themochini o koahelang mouoane oa vacuumho futhumala le ho fetoha mouoane ka mocheso oa ho hanyetsa o na le melemo ea sebopeho se bonolo, theko e tlaase le tšebeliso e tšepahalang.E ka sebelisoa bakeng sa ho roala mouoane oa thepa e nang le ntlha e tlaase ea ho qhibiliha, haholo-holo bakeng sa tlhahiso ea bongata e nang le litlhoko tse tlaase tsa boleng ba ho roala.Ho fihlela joale, ho ntse ho e-na le palo e kholo ea mekhoa ea ho roala ea ho hanyetsa mocheso le mouoane o sebelisoang ha ho etsoa liipone tsa aluminized.
Melemo ea ho hanyetsa mokhoa oa ho roala mouoane oa mohloli oa mouoane ke hore mocheso o phahameng o ka finyelloang ka ho futhumatsa o fokotsehile, 'me bophelo ba tšebeletso ea heater le bona bo khutšoanyane.Lilemong tsa morao tjena, molemong oa ho ntlafatsa bophelo ba mohloli oa mouoane oa ho hanyetsa, feme ea lisebelisoa e amohetse lisebelisoa tsa ceramic tsa conductive tse entsoeng ke boron nitride ka bophelo bo bolelele e le mohloli oa mouoane.Ho ea ka tlaleho ea patent ea Majapane, e ka sebelisa lisebelisoa tse entsoeng ka 20% ~ 30% boron nitride le lisebelisoa tsa refractory tse ka kopanngoang le eona ho etsa mohloli oa mouoane (crucible), le ho koahela bokaholimo ba eona ka lesela la zirconium le nang le 62% ~ 82%, 'me tse ling kaofela ke lisebelisoa tsa alloy tsa zirconium-silicon.
Nako ea poso: Apr-22-2023