Lisebelisoa tsa ho hloekisa plasma ea vacuum li nka sebopeho se kopaneng, se nang le sistimi ea ho hloekisa ion ea RF, taolo e ikemetseng ka botlalo, ts'ebetso e bonolo le tlhokomelo.
Jenereithara ea maqhubu a phahameng a RF e ka hlahisa plasma e phahameng haholo, ea kenya tšebetsong, ea ets'a le molora bokaholimo ba mosebetsi, ea tlosa lerōle le mafura holim'a sehlahisoa, ea lokolla khatello ea maikutlo, 'me ea fumana liphetoho tse fapaneng sebakeng sa mosebetsi.
E sebetsa ho rabara, khalase, ceramic, tšepe le lihlahisoa tse ling, 'me e sebelisoa ho microelectronics, LCD, LED, LCM, PCB circuit board, semiconductor packaging, lisebelisoa tsa bongaka, liteko tsa saense ea bophelo le likarolo tse ling.