|
Type |
Name |
Principle |
Working pressure range |
|
Mechanical Pump |
Single machine oil seal mechanical pump | Compressing and deflating gas by machinery | 105--101 |
| Double machine oil seal mechanical pump | 105--102 | ||
| Molecular pump | 101--108 | ||
| Roots pump | 103--102 | ||
|
Steam injection pump |
Oil injection pump | Carrying away the gas with the momentum of the steam jet | 101--107 |
| Oil diffusion pump | 101--106 | ||
| Mercury diffusion pump | 101--105 | ||
|
Dry pump |
Sputtering ion pump | Absorption and removal of gases by an absorbent film, formed by sublimation or sputtering | 101--108 |
| Titanium sublimation pump | 101--109 | ||
| Adsorption pump | Gas removal by physical adsorption on low-temperature surfaces | 106--102 | |
| Condensate pump | 102--1011 | ||
| Condensate adsorption pump | 102--1010 |
Post time: Nov-08-2022