Umgca wokugquma wamkela isakhiwo semodyuli, esinokunyusa ikamelo ngokwenkqubo kunye neemfuno zokusebenza kakuhle, kwaye zinokugqunywa kumacala omabini, aguquguqukayo kwaye alungele.Ixhotyiswe ngenkqubo yokucoca i-ion, inkqubo yokufudumeza ngokukhawuleza kunye ne-DC magnetron sputtering system, inokufaka ngokufanelekileyo idiphozithi elula yentsimbi.Isixhobo sinokubetha okukhawulezayo, i-clamping efanelekileyo kunye nokusebenza okuphezulu.
Umgca wokugquma uxhotyiswe ngokucoca i-ion kunye nenkqubo yokubhaka ephezulu, ngoko ke ukunamathela kwefilimu egciniweyo kungcono.I-engile encinci i-sputtering enethagethi ejikelezayo ikulungele ukubekwa kwefilimu kumphezulu ongaphakathi we-aperture encinci.
1. Isixhobo sinesakhiwo esincinci kunye nommandla omncinci womgangatho.
2. Inkqubo yokucoca ifakwe ipompo ye-molecular yokukhutshwa komoya, kunye nokusetyenziswa kwamandla aphantsi.
3. Ukubuyiswa okuzenzekelayo kwe-rack yezinto eziphathekayo kusindisa abasebenzi.
4. Iiparamitha zenkqubo zinokulandelwa, kwaye inkqubo yokuvelisa inokubekwa iliso kuyo yonke inkqubo ukuququzelela ukulandelela iziphene zemveliso.
5. Umgca wokugquma unomgangatho ophezulu wokuzenzekelayo.Ingasetyenziselwa kunye ne-manipulator ukudibanisa iinkqubo zangaphambili nasemva kunye nokunciphisa iindleko zabasebenzi.
Ingathatha indawo yokuprinta isilivere yesilivere kwinkqubo yokuvelisa i-capacitor, kunye nokusebenza okuphezulu kunye neendleko eziphantsi.
Isebenza kwiTi, Cu, Al, Cr, Ni, Ag, Sn kunye nezinye iintsimbi ezilula.Isetyenziswe ngokubanzi kwizixhobo ze-elektroniki ze-semiconductor, ezifana ne-ceramic substrates, i-ceramic capacitors, izixhaso ze-ceramic ezikhokelwayo, njl.