1) Iithagethi zeCylindrical zinezinga eliphezulu lokusetyenziswa kuneenjongo zeplani.Kwinkqubo yokugquma, nokuba luhlobo lwemagnethi olujikelezayo okanye luhlobo lwetyhubhu ejikelezayo ekujoliswe kuyo, zonke iindawo zomphezulu wetyhubhu ekujoliswe kuyo ngokuqhubekayo zidlula kwindawo yokutshiza eyenziwe phambi kwemagnethi esisigxina ukufumana i-cathode sputtering, kwaye Ithagethi inokufakwa ngokulinganayo, kwaye izinga lokusetyenziswa liphezulu.Izinga lokusetyenziswa kwezinto ekujoliswe kuzo limalunga nama-80% ~ 90%.
I-2) Iithagethi ze-Cylindrical aziyi kuba lula ukuvelisa "ityhefu ekujoliswe kuyo".Ngethuba lenkqubo yokugquma, umphezulu wetyhubhu ekujoliswe kuyo uhlala uhlanjululwa kwaye ugxininiswe yi-ion, kwaye akulula ukuqokelela i-oxides engqingqwa kunye nezinye iifilimu ezikhuselayo phezu komhlaba, kwaye akulula ukuvelisa "ityhefu ekujoliswe kuyo".
3) Isakhiwo se-rotary target tube type cylindrical sputtering target ilula kwaye kulula ukuyifaka.
I-4) I-cylindrical target target material ineentlobo ezahlukeneyo.Ithagethi ecwangcisiweyo kunye nethagethi yentsimbi yokupholisa ngokuthe ngqo kwamanzi, kwaye ezinye azikwazi ukuqhutyelwa phambili kwaye zenziwe iithagethi ze-cylindrical, ezifana nethagethi ye-In2-SnO2, njl njl kunye nezinto zomgubo zokucinezela i-isostatic eshushu ukufumana iithagethi ezifana nepleyiti, kuba ubungakanani abunakwenziwa. enkulu, kunye ne-brittle, ngoko ke kuyimfuneko ukusebenzisa indlela yokuqhayisa kunye ne-backplate yobhedu ukudibanisa kwaye emva koko ufake kwisiseko esijoliswe kuyo.Ukongeza kwimibhobho yetsimbi, iithagethi zekholomu nazo ziyakwazi ukutshizwa phezu kweepayipi zensimbi ezingenasici kunye nezixhobo ezahlukeneyo ezifunekayo ukuba zifakwe, ezifana neSi, Cr, njl.
Okwangoku, umlinganiselo weethagethi ze-cylindrical zokwaleka kwimveliso yoshishino iyanda.Iithagethi zeCylindrical azisebenzisi kuphela umatshini wokwambathisa othe nkqo kodwa zikwasebenzisa kumqulu wokuqengqeleka umatshini wokugquma.Kwiminyaka yakutshanje, iithagethi zamawele ezicwangcisiweyo zitshintshwa ngokuthe ngcembe ziithagethi zamawele eCylindrical.
——Eli nqaku likhutshwe nguGuangdong Zhenhua Technology, aumenzi woomatshini bokwaleka optical.
Ixesha lokuposa: May-11-2023