Yazisa:
Kwinkalo yetekhnoloji yokubekwa kwefilimu ebhityileyo, ukuphuphuma komqadi we-electron yindlela ebalulekileyo esetyenziswa kumashishini ahlukeneyo ukuvelisa iifilimu ezibhityileyo ezikumgangatho ophezulu.Iimpawu zayo ezizodwa kunye nokuchaneka okungenakulinganiswa kwenza ukuba kube yinto ekhangayo kubaphandi kunye nabavelisi.Nangona kunjalo, njengabo nabuphi na ubuchule, i-e-beam evaporation inemida yayo emikhulu.
Izinto eziluncedo zokuphuphuma komqa we-electron:
1. Izinga eliphezulu lokubeka: I-E-beam evaporation inezinga eligqwesileyo lokubeka xa lithelekiswa nezinye iindlela ezifana nokuphuma komphunga we-thermal okanye ukuphuphuma kwesputter.Oku kwenza ukwenziwa kweefilimu ezibhityileyo kusebenze ngakumbi, konga ixesha kunye nezixhobo.
2. Ukuphucula umgangatho wefilimu: I-E-beam evaporation inokuvelisa iifilimu ezinokunamathela kunye nokucoceka okugqwesileyo.Amandla aphezulu e-electron beam anceda ukucoceka ngokucokisekileyo umphezulu we-substrate, okukhokelela kumgangatho obalaseleyo wefilimu kunye nokuphucula ukusebenza kwemveliso yokuphela.
3. Ulawulo oluchanekileyo lobungqingqwa befilimu: Ukuphuphuma komqadi we-Electron kunokuqonda ulawulo oluchanekileyo lobungqingqwa befilimu efakiweyo.Eli nqanaba lokuchaneka libalulekile kwizicelo ezifuna ubukhulu obuchanekileyo bomaleko, njengeengubo zokukhanya.
Ububi bokuphuphuma kwe-electron beam:
1. Ukuhambelana kwezinto eziphathekayo: I-E-beam evaporation ayifanelekanga zonke izinto.Izinto ezithile, ngakumbi ezo zineendawo ezincibilikisiweyo eziphantsi okanye uxinzelelo oluphezulu lomphunga, zingakwazi ukumelana nobushushu obukhulu obuveliswa ngumqa we-electron.Oku kunciphisa uluhlu lwezinto ezinokuthi zifakwe ngokusebenzisa obu buchule.
2. Iindleko eziphezulu zezixhobo: Xa kuthelekiswa nezinye iindlela zokubeka, izixhobo ezifunekayo ekuphuhliseni umqa we-electron zibiza kakhulu.Olu tyalo-mali lokuqala lunokubangela umqobo wemali kwimisebenzi yezinga elincinci okanye amaziko ophando anohlahlo lwabiwo-mali olulinganiselwe.
3. Ukuseta kunye nokugcinwa okuntsonkothileyo: Ukuseta nokugcina inkqubo yokukhutshwa kwamanzi e-e-beam kunokuba ngumngeni.Ifuna ubuchule kunye nobuchule, kunye nokugcinwa rhoqo ukuqinisekisa ukusebenza okufanayo.Izinto ezintsonkothileyo ezibandakanyekayo zenza kube nzima ukuba ezo ndlela zintsha zincinci zokubonisa ifilimu ziqondwe.
Ixesha lokuposa: Jul-04-2023