Itekhnoloji yokugquma iCVD inezi mpawu zilandelayo:
1. Inkqubo yokusebenza kwezixhobo ze-CVD ilula kwaye iguquguqukayo, kwaye inokulungiselela iifilimu ezingatshatanga okanye ezidibeneyo kunye neefilimu ze-alloy ezinobungakanani obuhlukeneyo;
2. I-CVD yokugqoka inoluhlu olubanzi lwezicelo, kwaye ingasetyenziselwa ukulungiselela iintlobo ezahlukeneyo zentsimbi okanye ifilimu yefilimu;
3. Ukusebenza okuphezulu kwemveliso ngenxa yemilinganiselo yokubeka ukusuka kwii-microns ezimbalwa ukuya kumakhulu ama-microns ngomzuzu;
4. Xa kuthelekiswa nendlela ye-PVD, i-CVD inentsebenzo engcono ye-diffraction kwaye ifaneleke kakhulu kwii-substrates zokugquma ezinemilo enzima, njenge-grooves, imingxuma edibeneyo, kunye nezakhiwo zemingxuma eyimfama.Ukugquma kunokugqithwa kwifilimu enobumbano oluhle.Ngenxa yobushushu obuphezulu ngexesha lenkqubo yokwenza ifilimu, kunye nokunamathela okuqinileyo kwi-interface yefilimu ye-substrate, umaleko wefilimu uqine kakhulu.
5. Umonakalo obangelwa yi-radiation uphantsi kwaye unokudibaniswa neenkqubo zesekethe ezidibeneyo ze-MOS.
——Eli nqaku lipapashwe nguGuangdong Zhenhua, aumenzi womatshini wokugquma
Ixesha lokuposa: Mar-29-2023