① Ukulawulwa kakuhle kunye nokuphindaphindwa kobunzima befilimu
Ukuba ubungqingqwa befilimu bunokulawulwa ngexabiso elimiselweyo kubizwa ngokuba kukulawuleka kobunzima befilimu.Ubungqingqwa befilimu obufunekayo bunokuphinda buphindwe ngamaxesha amaninzi, obubizwa ngokuba yifilimu yobuninzi befilimu.Ke ngoko, ubukhulu befilimu ene-sputtered buyalawuleka, kwaye ifilimu enobungqingqwa obumiselwe kwangaphambili ingafakwa ngokuthembekileyo.Ukongeza, ukugquma kwe-sputter kunokufumana ifilimu enobunzima obufanayo kwindawo enkulu.
② Ukunamathela okuqinileyo phakathi kwefilimu kunye ne-substrate
Amandla e-athom esputtered yi-1-2 orders of magnitude ngaphezulu kwaleyo yeeathom eziphuphumayo.Ukuguqulwa kwamandla ee-athom ezisasazekileyo eziphezulu zamandla afakwe kwi-substrate ephezulu kakhulu kune-athomu ekhutshiweyo, eyenza ubushushu obuphezulu kwaye ikhulise ukunamathela phakathi kwe-athomu echithakeleyo kunye ne-substrate.Ukongeza, ezinye iiathom ezinamandla ezitshiziweyo zivelisa amanqanaba ahlukeneyo enaliti, zenza umaleko we-pseudodiffusion kwi-substrate.Ukongezelela, i-substrate isoloko ihlanjululwa kwaye isebenze kwingingqi ye-plasma ngexesha lenkqubo yokwenza ifilimu, esusa ii-athomu ze-sputtering kunye ne-adhesion ebuthakathaka, kwaye ihlambulule kwaye isebenze i-substrate surface.Ngoko ke, ifilimu ene-sputtered inokubambelela ngokuqinileyo kwi-substrate.
③ Ifilim yemathiriyeli entsha eyahlukileyo kwithagethi inokulungiswa
Ukuba igesi esebenzayo yaziswa ngexesha lokutshiza ukwenza ukuba iphendule ngokujoliswe kuyo, ifilimu entsha yezinto ehluke ngokupheleleyo kwithagethi inokufumaneka.Ngokomzekelo, i-silicon isetyenziswa njengethagethi yokutshiza, kwaye ioksijini kunye ne-argon zifakwa kwigumbi lokucoca kunye.Emva kwe-sputtering, ifilimu yokukhusela i-SiOz inokufumaneka.Ukusebenzisa i-titanium njengento ekujoliswe kuyo, i-nitrogen kunye ne-argon zifakwe kwigumbi lokuhlambela kunye, kunye nesigaba sefilimu efana negolide ye-TiN inokufumaneka emva kokutshiza.
④ Ukucoceka okuphezulu kunye nomgangatho olungileyo wefilimu
Ekubeni akukho nxalenye ye-crucible kwisixhobo sokulungiselela ifilimu ye-sputtering, amacandelo e-heater crucible material ayayi kuxutywa kwi-sputtering film layer.Ukungalungi kwe-sputtering coating kukuba isantya sokwenza ifilimu sicotha kuneso sokugquma kwe-evaporation, ubushushu be-substrate buphezulu, kulula ukuchatshazelwa yigesi yokungcola, kwaye isakhiwo sesixhobo sinzima ngakumbi.
Eli nqaku lipapashwe ngu Guangdong Zhenhua, umenzi weizixhobo zokugquma ivacuum
Ixesha lokuposa: Mar-09-2023