Ukuqaliswa kokufakwa kwe-vacuum vapour, i-sputtering kunye ne-ion coating

I-vacuum yokwambathisa ikakhulu ibandakanya ukubekelwa umphunga ofunxayo, ukutyabeka ukutyabeka kunye nokwaleka kwe-ion, zonke ezisetyenziselwa ukufaka iifilim ezahlukeneyo zetsimbi kunye nezingezizo ezentsimbi kumphezulu wamalungu eplastiki ngokuxutywa okanye ukutshiza phantsi kweemeko zokufunxa, ezinokufumana indawo ecolekileyo kakhulu yokugquma. kunye nenzuzo ebalaseleyo yokubambelela ngokukhawuleza, kodwa ixabiso liphezulu, kwaye iintlobo zesinyithi ezinokusebenza zincinci, kwaye zisetyenziselwa ukugquma okusebenzayo kweemveliso zodidi oluphezulu.

I-vacuum vapor deposition yindlela yokufudumeza isinyithi phantsi kwe-vacuum ephezulu, iyenze inyibilike, ikhuphe, kwaye yenze ifilimu yentsimbi ebhityileyo kumphezulu wesampuli emva kokupholisa, kunye nobukhulu be-0.8-1.2 um.Igcwalisa indawo encinci ye-concave kunye ne-convex kumphezulu wemveliso eyenziweyo ukufumana indawo efana nesipili. kufuneka igqunywe.

Ukutshiza ngokuqhelekileyo kubhekisa kwi-magnetron sputtering, indlela yokutshiza enesantya esiphezulu sobushushu obuphantsi.Inkqubo ifuna vacuum malunga 1×10-3Torr, oko kukuthi 1.3×10-3Pa vacuum karhulumente ezaliswe argon gas inert (Ar), naphakathi substrate yeplastiki (anode) kunye nethagethi metal (cathode) plus high-voltage. ngokuthe ngqo okwangoku, ngenxa ye-electron excitation ye-inert gas eveliswa ngokuphuma okukhanyayo, ukuvelisa i-plasma, i-plasma iya kuqhuma ii-athomu zethagethi yesinyithi kwaye ifake kwi-substrate yeplastiki.Uninzi lwezigqubuthelo zesinyithi ngokubanzi zisebenzisa i-DC sputtering, ngelixa izixhobo ze-ceramic ezingaqhubekiyo zisebenzisa i-RF AC sputtering.

Ukwaleka kwe-Ion yindlela apho ukukhutshwa kwerhasi kusetyenziswa ngokuyinxenye i-ionize igesi okanye into engumphunga phantsi kweemeko ze-vacuum, kwaye into ekhutshwa ngumphunga okanye i-reactants yayo ifakwe kwi-substrate ngokuqhushumba kweeyoni zegesi okanye iiyoni zento engumphunga.Ezi ziquka i-magnetron sputtering ion coating, i-ion ye-ion esebenzayo, i-cathode yokukhupha i-ion yokukhutshwa kwe-ion (indlela yokubeka umphunga we-cathode), kunye nokwaleka kwe-ion ye-arc (i-cathode arc ion).

Imagnetron ethe nkqo emacaleni amabini etshiza icoat eqhubekayo emgceni
Ukusebenziseka okubanzi, kunokusetyenziselwa iimveliso zombane ezifana neqokobhe le-EMI elikhuselayo, iimveliso ezisicaba, kunye nazo zonke iimveliso zekomityi yesibane ngaphakathi kobude obuthile bunokuveliswa.Umthamo omkhulu wokulayisha, ukudibanisa okubambeneyo kunye nokubambene ngokugxagxamisayo kweekomityi ezikhanyayo zotyalo-macala amabini, ezinokuthi zibe nomthamo omkhulu wokulayisha.Umgangatho ozinzileyo, ukuhambelana kakuhle komgangatho wefilimu ukusuka kwibhetshi ukuya kwibhetshi.Iqondo eliphezulu lokuzisebenzela kunye neendleko eziphantsi zokusebenza.