Ukusebenza kweempompo ezahlukeneyo ze-vacuum kunomnye umahluko ngaphandle kokukwazi ukumpompa i-vacuum kwigumbi.Ngoko ke, kubaluleke kakhulu ukucacisa umsebenzi owenziwe yimpompo kwi-vacuum system xa ukhetha, kwaye indima edlalwa yimpompo kwiindawo ezahlukeneyo zokusebenza ishwankathelwa ngolu hlobo lulandelayo.
1, Ukuba yimpompo ephambili kwinkqubo
Ipompo ephambili yimpompo yokucoca epompa ngokuthe ngqo igumbi lokupompa le-vacuum system ukuze ufumane idigri ye-vacuum efunekayo ukuhlangabezana neemfuno zenkqubo.
2. Impompo yokumpompa erhabaxa
Impompo yokumpompa erhabaxa yimpompo yokufunxa eqala ukunciphisa kuxinzelelo lomoya kwaye uxinzelelo lwenkqubo yokufunxa lufikelela kwenye inkqubo yokumpompa enokuqalisa ukusebenza.
I-3, impompo yangaphambi kwenqanaba
Impompo yenqanaba langaphambili yimpompo yokucoca esetyenziselwa ukugcina uxinzelelo lwangaphambi kwenqanaba lenye impompo ngaphantsi koxinzelelo oluphezulu oluvunyelweyo lwangaphambili.
4. Ukubamba impompo
Impompo yokubamba yimpompo engakwazi ukusebenzisa ngokufanelekileyo impompo ephambili yenqanaba langaphambili xa ukumpompa kwenkqubo yokucoca incinci kakhulu.Ngenxa yesi sizathu, olunye uhlobo lwempompo encedisayo yangaphambi kwesiteji kunye nesantya esincinci sokupompa sisetyenziswe kwinkqubo yokucoca ukugcina umsebenzi oqhelekileyo wempompo ephambili okanye ukugcina uxinzelelo oluphantsi olufunwa yisitya esingenanto.
5. Impompo yokufunxa erhabaxa okanye impompo yokufunxa ephantsi
Impompo yokufunxa erhabaxa okanye ephantsi yimpompo yokufunxa eqala emoyeni kwaye isebenze kuluhlu loxinzelelo lwevacuum ephantsi okanye erhabaxa emva kokunciphisa uxinzelelo lwesitya esimponthiweyo.
6. Impompo yokufunxa ephezulu
Impompo yokufunxa ephezulu ibhekisa kwimpompo yokufunxa esebenza kuluhlu lwevacuum ephezulu.
7. Impompo yokufunxa yeUltra-high
Impompo yokufunxa ekumgangatho ophezulu ibhekisa kwimpompo yokufunxa esebenza kuluhlu lwevacuum ephezulu kakhulu.
8. Impompo yokunyusa
Impompo ye-Booster idla ngokubhekisa kwimpompo yokufunxa esebenza phakathi kwempompo yokufunxa ephantsi kunye nempompo ephezulu yokufunxa ukunyusa umthamo wokumpompa wenkqubo yokumpompa kuluhlu loxinzelelo oluphakathi okanye ukunciphisa imfuneko yesantya sokumpompa kwempompo yangaphambili.
Intshayelelo ye-Ion Cleaner
Isicoci sePlasma
1. I-Plasma yigesi ye-ionized apho ubuninzi bee-ion kunye nee-electron zilingana ngokulinganayo.Iqukethe i-ion, i-electron, i-radicals yamahhala, kunye namasuntswana angathathi hlangothi.
2. Yimeko yesine yombandela.Njengoko iplasma iyindibaniselwano yamandla aphezulu kunerhasi, into ekummandla weplasma inokufumana ngakumbi i-physicochemical kunye nezinye iimpawu zokusabela.
3. Umatshini wokucoca i-plasma kukuthembela "kwisimo se-plasma" sezinto eziphathekayo "i-activation effect" ukususa amabala angaphezulu.
4. Ukucoca i-Plasma kwakhona lolona hlobo lokucoca olungenasiphelo phakathi kwazo zonke iindlela zokucoca.Inokusetyenziswa ngokubanzi kwi-semiconductor, i-microelectronics, i-COG, i-LCD, i-LCM kunye nenkqubo ye-LED.
5. Ukucoca ngokuchanekileyo phambi kokupakishwa kwesixhobo, i-vacuum electronics, izihlanganisi kunye neereyilayi, imboni ye-solar photovoltaic, iplastiki, irabha, isinyithi kunye nokucoca umphezulu we-ceramic, unyango lwe-etching, unyango lwe-ashing, ukusetyenziswa komphezulu kunye nezinye iinkalo zovavanyo lwesayensi yobomi.
Ixesha lokuposa: Nov-07-2022