Zeziphi izinto ezichaphazela ityhefu ekujoliswe kuyo kwi-magnetron sputtering?

I-1, Ukuqulunqwa kweengqungquthela zetsimbi kwindawo ekujoliswe kuyo
Ingaba iphi i-compound eyenziwe kwinkqubo yokwenziwa komdibaniso ukusuka kwindawo ekujoliswe kuyo yintsimbi ngenkqubo esebenzayo yokutshiza?Ekubeni ukusabela kweekhemikhali phakathi kweengqungquthela zegesi ezisebenzayo kunye ne-athomu yendawo ekujoliswe kuyo ivelisa i-athomu edibeneyo, edla ngokuba yi-exothermic, ukushisa okusabelayo kufuneka kube nendlela yokuphuma, ngaphandle koko ukusabela kweekhemikhali akukwazi ukuqhubeka.Ngaphantsi kweemeko ze-vacuum, ukuhanjiswa kobushushu phakathi kweegesi akunakwenzeka, ngoko ke ukuphendula kweekhemikhali kufuneka kwenzeke kwindawo eqinile.I-reaction sputtering yenza iikhompawundi kumphezulu ekujoliswe kuwo, umphezulu wesubstrate, kunye neminye imiphezulu yesakhiwo.Ukuvelisa iikhompawundi kumphezulu we-substrate yinjongo, ukuvelisa iikhompawundi kweminye imiphezulu yesakhiwo yinkcitho yemithombo, kwaye ukuvelisa iikhompawundi kumphezulu ekujoliswe kuwo kuqala njengomthombo wee-athom ezihlanganisiweyo kwaye kube ngumqobo wokuqhubekeka ukubonelela ngee-athom ezidibeneyo.

2, Imiba yempembelelo yetyhefu ekujoliswe kuyo
Eyona nto iphambili echaphazela ityhefu ekujoliswe kuyo ngumlinganiselo werhasi yokusabela kunye nerhasi yokutshiza, irhasi yokusabela kakhulu iya kukhokelela kwityhefu ekujoliswe kuyo.Reactive sputtering inkqubo iqhutywa kwindawo ekujoliswe kuyo umphezulu sputtering channel ibonakala igutyungelwe ikhompawundi reaction okanye ikhompawundi reaction iyahluthwa kwaye kwakhona evezwe umphezulu metal.Ukuba umyinge wokuveliswa kwekhompawundi mkhulu kunomlinganiselo wokuhlutywa komdibaniso, indawo egqunyiweyo iyanyuka.Kumandla athile, isixa serhasi esisabelayo ebandakanyekayo kwimveliso edityanisiweyo siyenyuka kwaye nesantya sokwenziwa kombane siyenyuka.Ukuba isixa segesi yokusabela sinyuka ngokugqithisileyo, indawo yokugubungela ikhompawundi iyanda.Kwaye ukuba isantya sokuqukuqela kwerhasi esisabelayo asikwazi kulungelelaniswa ngexesha, umlinganiselo wokunyuka kwendawo yokugquma komxhaka awucinezelwa, kwaye umjelo wokutshiza uya kugqunywa ngakumbi yikhompawundi, xa ithagethi yokutshiza igutyungelwe ngokupheleleyo yikhompawundi, ekujoliswe kuko. ityhefu ngokupheleleyo.

I-3, into ekujoliswe kuyo yityhefu
(1) ukuqokelelwa kwe-ion elungileyo: xa ityhefu ekujoliswe kuyo, umaleko wefilimu ekhuselayo iya kwenziwa kwindawo ekujoliswe kuyo, ii-ion ezi-positive zifikelela kwindawo ekujoliswe kuyo ye-cathode ngenxa yokuvaleka komgangatho we-insulating.Hayi ngokuthe ngqo ukungena kwindawo ekujoliswe kuyo cathode, kodwa ziqokelele kwindawo ekujoliswe kuyo, kulula ukuvelisa intsimi ebandayo ukukhupha arc - arcing, ukuze cathode sputtering ayikwazi ukuqhubeka.
(2) ukulahleka kwe-anode: xa ityhefu ekujoliswe kuyo, udonga lwegumbi le-vacuum lusekelwe kwifilimu ekhuselayo, ukufikelela kwi-electrons ye-anode ayikwazi ukungena kwi-anode, ukusekwa kwe-anode kunyamalala.

I-4, Inkcazo ebonakalayo yetyhefu ekujoliswe kuyo
(1) Ngokubanzi, i-elektroni yesibini ekhutshwayo i-coefficient ye-metal compounds iphezulu kuneyesinyithi.Emva kwetyhefu ekujoliswe kuyo, umphezulu wenjongo yazo zonke iikhompawundi zetsimbi, kwaye emva kokuqhunyiswa kwee-ion, inani leelektroni zesibini ezikhutshiweyo ziyanda, eziphucula ukuqhutyelwa kwendawo kunye nokunciphisa i-impedance ye-plasma, ekhokelela kumbane ophantsi wokutshiza.Oku kunciphisa izinga lokutshiza.Ngokubanzi amandla ombane wokutshiza we-magnetron sputtering aphakathi kwe-400V-600V, kwaye xa ityhefu ekujoliswe kuyo isenzeka, amandla ombane wokutshiza ayancipha kakhulu.
(2) Ithagethi yesinyithi kunye nethagethi yekhompawundi ekuqaleni isantya sokutshiza yahlukile, ngokuqhelekileyo i-coefficient ye-sputtering yentsimbi iphezulu kune-coefficient ye-sputtering ye-compound, ngoko ke izinga lokutshiza liphantsi emva kwetyhefu ekujoliswe kuyo.
(3) Ukusebenza kokutshiza kwerhasi esebenzayo yokutshiza kuqala kusezantsi kunokusebenza kwerhasi engasebenziyo, ngoko ke izinga lokutshiza elibanzi liyehla emva kokunyuka kwerhasi esebenzayo.

I-5, Izisombululo zetyhefu ekujoliswe kuyo
(1) Yamkela unikezelo lwamandla ombane ophakathi okanye unikezelo lwamandla kanomathotholo.
(2) Yamkela ulawulo oluvaliweyo lokungena kwegesi yokusabela.
(3) Yamkela iithagethi ezimbini
(4) Lawula utshintsho lwendlela yokugquma: Ngaphambi kokugquma, ijika lempembelelo ye-hysteresis yetyhefu ekujoliswe kuyo iqokelelwe ukwenzela ukuba ukuhamba komoya okungenayo kulawulwe ngaphambili kokuvelisa ityhefu ekujoliswe kuyo ukuqinisekisa ukuba inkqubo isoloko ikwimo phambi kokubekwa. izinga lehla ngokukhawuleza.

-Eli nqaku lipapashwe nguGuangdong Zhenhua Technology, umenzi wezixhobo zokugquma.