Yintoni ukuxhathisa umthombo womoya wokwaleka?

Ukwaleka komthombo wobushushu yindlela yokwaleka isiseko sevacuum.“Umphunga” ubhekiselele kwindlela yokulungiselela ifilimu ecekethekileyo apho izinto zokugquma kwigumbi lokufunxa zifudunyezwa zibe ngumphunga, ukuze iiathom okanye iiathom eziphathekayo zibe ngumphunga kwaye zibaleke ukusuka kumphezulu, zenze into yokuqukuqela komphunga, isehlo kumphezulu womoya. i-substrate okanye i-substrate, kwaye ekugqibeleni igxininiswe ukwenza ifilimu eqinile.

Indlela ebizwa ngokuba yi-resistance evaporation source coating kukusebenzisa i-tantalum, i-molybdenum, i-tungsten kunye nezinye iindawo eziphezulu zokunyibilika zesinyithi ukwenza imilo efanelekileyo yomthombo wokuphuphuma komphunga, olayishwe ngezinto ezinokuthi zibe ngumphunga, ukuvumela umoya uqukuqele, ubushushu obuthe ngqo kunye nobushushu. khupha izinto ezikhutshwa ngumphunga, okanye ubeke izinto ezinokuthi zibe ngumphunga kwi-alumina, i-beryllium oxide kunye nezinye ii-crucibles zokufudumeza ngokuthe ngqo kunye nokunyuka.Le yindlela yokumelana nokufudumeza umphunga.

Iumatshini wokugquma umphunga wokugqumaifudunyezwe kwaye ikhutshwe yi-heater yokumelana ineenzuzo zesakhiwo esilula, ixabiso eliphantsi kunye nokusetyenziswa okuthembekileyo.Ingasetyenziselwa ukugquma kwezixhobo ezinendawo yokunyibilika ephantsi, ngakumbi kwimveliso yobuninzi kunye neemfuno eziphantsi zomgangatho wokugquma.Ukuza kuthi ga ngoku, kusekho inani elikhulu leenkqubo zokugquma zokufudumeza okuxhathisayo kunye nokunyuka komphunga kusetyenziswe ukuveliswa kwezibuko ezilumkileyo.

Ukungalungi ukuxhathisa evaporation umthombo evaporation yokwambathisa indlela yokwaleka kukuba ubushushu eliphezulu enokufikelelwa ngokufudumeza kulinganiselwe, kwaye ubomi benkonzo heater nayo bufutshane.Kwiminyaka yakutshanje, ukuze kuphuculwe ubomi bomthombo wokuchasana nokunyuka komphunga, umzi-mveliso wezixhobo uye wamkela imathiriyeli ye-ceramic eqhutywayo eyenziwe yi-boron nitride nobomi obude njengomthombo wokuphuphuma komphunga.Ngokwengxelo yaseJapan patent, inokusebenzisa izinto ezenziwe nge-20% ~ 30% ye-boron nitride kunye nezixhobo eziphikisayo ezinokudityaniswa kunye nayo ukwenza umthombo wokuphuphuma komphunga (i-crucible), kwaye igqume umphezulu wayo nge-zirconium equkethe i-62% ~ 82%, kunye nezinye zirconium-silicon alloy materials.