Izixhobo zokucoca i-plasma ye-vacuum zisebenzisa isakhiwo esidibeneyo, esixhotyiswe nge-RF ion yokucoca inkqubo, ulawulo oluzenzekelayo ngokupheleleyo, ukusebenza ngokufanelekileyo kunye nokugcinwa.
Ijenereyitha ye-RF ephezulu-frequency inokuvelisa iplasma yoxinaniso oluphezulu, isebenze, i-etch kunye nothuthu indawo yokusebenza, isuse ngokufanelekileyo uthuli kunye negrisi kumphezulu wemveliso, ikhulule uxinzelelo lomphezulu, kwaye ifumane uhlengahlengiso olwahlukeneyo kumphezulu womsebenzi.
Isebenza kwi-rubber, iglasi, i-ceramic, isinyithi kunye nezinye iimveliso, kwaye isetyenziswe kwi-microelectronics, i-LCD, i-LED, i-LCM, ibhodi yesekethe ye-PCB, ukupakishwa kwe-semiconductor, izixhobo zonyango, iimvavanyo zesayensi yobomi kunye nezinye iinkalo.