Umugqa wokugcoba wamukela isakhiwo se-modular, esingandisa ikamelo ngokuvumelana nenqubo kanye nezidingo zokusebenza kahle, futhi singafakwa ezinhlangothini zombili, eziguquguqukayo futhi ezilula.Ifakwe uhlelo lokuhlanza i-ion, isistimu yokushisisa ngokushesha kanye nesistimu ye-DC magnetron sputtering, ingafaka kahle ukunamathela kwensimbi elula.Imishini inesigqi esisheshayo, i-clamping elula nokusebenza kahle okuphezulu.
Umugqa wokugcoba ufakwe i-ion yokuhlanza kanye nesistimu yokubhaka ephezulu, ngakho-ke ukunamathela kwefilimu efakiwe kungcono.I-engeli encane i-sputtering enethagethi ejikelezayo ivuna ukubekwa kwefilimu endaweni engaphakathi yendawo encane.
1. Izinto ezisetshenziswayo zinesakhiwo esihlangene nendawo encane yaphansi.
2. Isistimu ye-vacuum ifakwe iphampu yamangqamuzana yokukhipha umoya, esebenzisa amandla aphansi.
3. Ukubuya okuzenzakalelayo kwerack impahla kusindisa abasebenzi.
4. Imingcele yenqubo ingalandelelwa, futhi inqubo yokukhiqiza ingabhekwa kuyo yonke inqubo ukuze kube lula ukulandelela amaphutha okukhiqiza.
5. Umugqa wokugcoba unezinga eliphezulu lokuzenzekelayo.Ingasetshenziswa ne-manipulator ukuxhuma izinqubo zangaphambili nangemuva futhi unciphise izindleko zabasebenzi.
Ingathatha indawo yokuphrinta yesiliva yokunamathisela kwinqubo yokukhiqiza i-capacitor, ngokusebenza kahle okuphezulu kanye nezindleko eziphansi.
Isebenza ku-Ti, Cu, Al, Cr, Ni, Ag, Sn nezinye izinsimbi ezilula.Isetshenziswe kabanzi ezingxenyeni ze-elektroniki ze-semiconductor, njengama-substrates e-ceramic, ama-capacitor e-ceramic, izisekelo ze-ceramic eziholayo, njll.