Isingeniso esifushane kanye nezinzuzo zemishini yokuhlanganisa i-magnetron sputtering

Isimiso se-Magnetron sputtering: ama-electron angqubuzana nama-athomu e-argon ohlelweni lokusheshisa ku-substrate ngaphansi kwesenzo sensimu kagesi, i-ionizing inqwaba yama-argon ion nama-electron, futhi ama-electron andizela ku-substrate.I-argon ion isheshisa ukuhlasela into eqondiwe ngaphansi kwesenzo senkundla kagesi, isakaze inani elikhulu lama-athomu aqondiwe, afakwa ku-substrate njengama-athomu aqondiwe angathathi hlangothi (noma ama-molecule) ukuze akhe ifilimu.Lapho i-electron yesibili isheshisa ukuze indizele ku-substrate, ngaphansi kwethonya lamandla ka-Lorentz wenkundla kazibuthe, iveza ifomu eliyinhlanganisela eli-spiral ne-cycloid ukwenza uchungechunge lokunyakaza okuyindilinga endaweni okuqondiwe kuyo.I-electron ayinayo nje indlela ende yokunyakaza, Isesendaweni ye-plasma eduze nendawo eqondiwe yi-electromagnetic field theory beam, lapho inani elikhulu le-Ar lifakwa ionized ukuze liqhume okuhlosiwe, ngakho izinga lokubeka i-magnetron. idivayisi yokumboza i-sputtering iphezulu.

Ngakho, amagnetron sputtering enamathela imishiniseyenziwe, ehlanganisa ubuchwepheshe be-magnetron sputtering kanye ne-ion coating, futhi inikeza isisombululo sokuthuthukisa ukungaguquguquki kombala kanye ne-https://www.zhenhuavac.com/wp-admin/post.php?post=5107&action=edit&message=1# ukuzinza kwezinga lokubeka kanye nokwakheka okuhlanganisiwe.Ngokwezidingo ezahlukene zomkhiqizo, kungakhethwa uhlelo lokushisa, uhlelo lokuchema, uhlelo lwe-ionization namanye amadivaysi.Ukusatshalaliswa okuhlosiwe kungalungiswa kalula, futhi ukufana kwefilimu kuphakeme.Ngezinto ezihlosiwe ezihlukene, ifilimu eyinhlanganisela esebenza kangcono ingalungiswa.I-coating elungiselelwe imishini inezinzuzo zamandla aqinile ahlanganisiwe kanye nokuhlangana, okungathuthukisa ngokuphumelelayo ukumelana nosawoti wesifutho, ukumelana nokugqoka kanye nobulukhuni bobuso bomkhiqizo, futhi kuhlangabezane nezidingo zokulungiswa kokusebenza okuphezulu kokusebenza.
Izinto ezisetshenziswayo zicebile ngezinto ezisebenzayo, ezingasetshenziselwa insimbi engagqwali enamanzi acwecwe izingxenye zepulasitiki, ingilazi, izitsha zobumba nezinye izinto.Isetshenziselwa ikakhulukazi ihadiwe yemikhiqizo ye-elekthronikhi, amawashi namawashi asezingeni eliphezulu, ubucwebe bezinga eliphezulu kanye nehardware yezimpahla zesikhumba zomkhiqizo neminye imikhiqizo ecebile.