① Ukulawulwa okuhle nokuphindaphindwa kogqinsi lwefilimu
Ukuthi ukujiya kwefilimu kungalawuleka ngenani elinqunywe kusengaphambili kubizwa ngokuthi ukujiya kwefilimu.Ubukhulu befilimu obudingekayo bungaphindwa izikhathi eziningi, okubizwa ngokuthi ukujiya kwefilimu ukuphindaphindeka.Ngenxa yokuthi uketshezi lwamanje kanye nomthamo oqondiwe we-vacuum sputtering coating ingalawulwa ngokuhlukana.Ngakho-ke, ukushuba kwefilimu ene-sputtered buyalawuleka, futhi ifilimu enogqinsi olunqunywe kusengaphambili ingafakwa ngokuthembekile.Ngaphezu kwalokho, i-sputter coating ingathola ifilimu enobukhulu obufanayo endaweni enkulu.
② Ukunamathela okuqinile phakathi kwefilimu ne-substrate
Amandla ama-athomu ahlakazekile angama-oda angu-1-2 obukhulu ngaphezu kwalawo ama-athomu ahwamukile.Ukuguqulwa kwamandla kwama-athomu afafazekile aphezulu afakwe ku-substrate kuphezulu kakhulu kunalawo ama-athomu ahwamukile, akhiqiza ukushisa okuphezulu futhi athuthukise ukunamathela phakathi kwama-athomu ahlakazekile ne-substrate.Ngaphezu kwalokho, amanye ama-athomu ashaphazwe ngamandla aphezulu akhiqiza amazinga ahlukene omjovo, enze ungqimba lwe-pseudodiffusion ku-substrate.Ngaphezu kwalokho, i-substrate ihlale ihlanzwa futhi isebenze endaweni ye-plasma ngesikhathi senqubo yokwenza ifilimu, esusa ama-athomu ama-sputtering nge-adhesion ebuthakathaka, futhi ihlanza futhi isebenze i-substrate surface.Ngakho-ke, ifilimu ene-sputtered inokunamathela okuqinile ku-substrate.
③ Ifilimu entsha yezinto ezibonakalayo ehlukile kunethagethi ingalungiswa
Uma igesi esebenzayo yethulwa ngesikhathi sokufafaza ukuze yenze isabele ngokuhlosiwe, kungatholwa ifilimu entsha yezinto ehluke ngokuphelele kulokho okuqondiwe.Isibonelo, i-silicon isetshenziswa njengethagethi yokufafaza, futhi umoya-mpilo ne-argon kufakwa egumbini le-vacuum ndawonye.Ngemuva kokufaka i-sputtering, ifilimu ye-SiOz insulating ingatholakala.Kusetshenziswa i-titanium njengethagethi yokufafaza, i-nitrogen ne-argon kufakwa egunjini le-vacuum ndawonye, futhi isigaba sefilimu esifana negolide se-TiN singatholakala ngemva kokufafaza.
④ Ukuhlanzeka okuphezulu kanye nekhwalithi enhle yefilimu
Njengoba ingekho ingxenye ye-crucible kudivayisi yokulungiselela ifilimu e-sputtering, izingxenye ze-crucible heater material ngeke zixutshwe kungqimba lwefilimu e-sputtering.Ububi be-sputtering coating ukuthi isivinini sokwenza ifilimu sihamba kancane kunaleso se-evaporation coating, izinga lokushisa le-substrate liphakeme, kulula ukuthintwa igesi yokungcola, futhi isakhiwo sedivayisi siyinkimbinkimbi kakhulu.
Le ndatshana ishicilelwe nguGuangdong Zhenhua, umkhiqizi weimishini yokufaka i-vacuum
Isikhathi sokuthumela: Mar-09-2023