Inqubo ye-hollow cathode ion coating imi kanje:
1, Faka ama-Chin ingots ekugoqeni.
2, Ukukhweza i-workpiece.
3, Ngemva kokuthuthela ku-5 × 10-3Pa, igesi ye-argon ingeniswa ekamelweni lokumboza lisuka eshubhu lesiliva, futhi izinga le-vacuum lizungeze i-100Pa.
4.Vula amandla okuchema.
5, Ngemva kokuvula amandla e-arc ukuthungela ukuphuma kwe-cathode engenalutho.Ukukhishwa okukhanyayo kukhiqizwa epayipini lenkinobho, I-voltage yokukhipha ingu-800 ~ 1000V, i-arc-raising current ingu-30~50A.Ngenxa yomphumela we-cathode ongenalutho wokukhanya. ukuphuma, ukuminyana kwamanje kokukhishwa kokukhanya okuphezulu,Ukuminyana okuphezulu kwamagundane eshubhu lesiliva kubhomba udonga lweshubhu ye-vantage, Yenza udonga lweshubhu lufudumale lufinyelele ekuphumeni kokugeleza kwe-electron, imodi yokukhipha kusuka ekuphumeni kokukhanya ishintshe ngokuzumayo i-arc discharge,I-Voltage ingu-40~70V,Yamanje ingu-80~300A.Izinga lokushisa leshubhu lesiliva lifinyelela ngaphezu kuka-2300K,Incandescent,Ikhipha umfudlana omkhulu wama-arc electron ukusuka eshubhu, futhi idutshulwe ku-anode.
6, Ukulungiswa kwezinga le-vacuum.Izinga lokukhishwa kwe-vacuum lokukhishwa okukhanyayo kusuka kusibhamu se-cathode esingenalutho lingaba ngu-100 Pa,Futhi i-vacuum degree ye-coating ingu-8×10-1~2Pa.Ngakho-ke,Ngemva kokushiswa kokukhishwa kwe-arc,Yehlisa i-argon engenayo. igesi ngokushesha ngangokunokwenzeka, Lungisa izinga le-vacuum kububanzi obufanele ukunameka.
7, I-Titanium plated base layer.I-Electron igeleza ingene engosini yensimbi egoqeke ngendlela engavamile, Ukuguqulwa kwamandla e-kinetic abe amandla ashisayo, Ukuhwamuka kwensimbi yesilevu ngokushisisa, ama-athomu omhwamuko afinyelela endaweni yokusebenza ukuze akhe ifilimu ye-titanium.
8, Ukubekwa kwe-TiN. Igesi ye-nitrogen inikezwa ekamelweni lokumboza, igesi ye-nitrogen nama-athomu ahwamukile afakwa i-ioniyithrojeni ne-titanium ion.Ngaphezu kwe-crucible, Amathuba aphezulu okushayisana kwe-inelastic yama-athomu omphunga we-titanium anemifudlana eminyene yama-electron anamandla aphansi, Izinga lokuhlukaniswa kwensimbi liphezulu kakhulu njenge-20% ~ 40%., Ama-ion e-Titanium cishe asabela ngamakhemikhali nge-reaction gas nitrogen,I-Deposition ukuze kutholwe ungqimba lwefilimu ye-nitride mantle.Isibhamu se-cathode esingenalutho siwumthombo wokuhwamuka, Omunye umthombo ye-ionization.Ngesikhathi sokumbozwa, I-current yekhoyili ka-electromagnetic ezungeze i-crucible kufanele futhi ilungiswe, Gxila kugongolo lwe-electron phakathi nendawo yokuwa,Ngakho, ukuminyana kwamandla okugeleza kwe-electron kuyenyuka.
9, Ukucisha Amandla.Ngemva kokuba ukushuba kwefilimu kufinyelele ubukhulu befilimu obunqunywe kusengaphambili, Vala ukunikezwa kwamandla kwe-arc, ukunikezwa kwamandla kwe-Bias kanye nokunikezwa komoya.
Isikhathi sokuthumela: Jul-08-2023