Ukufakwa kwefilimu elizacile kuyinqubo eyisisekelo esetshenziswa embonini ye-semiconductor, nakwezinye izindawo eziningi zesayensi yezinto zokwakha kanye nobunjiniyela. Kubandakanya ukwakhiwa kongqimba oluncane lwezinto ezibonakalayo ku-substrate. Amafilimu adiphozithiwe angaba nogqinsi olubanzi, kusukela kwezendlalelo ze-athomu ezimbalwa ukuya kuma-micrometer ambalwa. Lawa mafilimu angafeza izinjongo eziningi, njengamakhondatha kagesi, ama-insulators, ama-optical coatings, noma izithiyo zokuzivikela.
Nazi izindlela eziyinhloko ezisetshenziselwa ukufakwa kwefilimu emincane:
I-Physical Vapor Deposition (PVD)
I-Sputtering:I-ion enamandla amakhulu isetshenziselwa ukuwisa ama-athomu entweni eqondiwe, bese ifakwa ku-substrate.
Ukuhwamuka:** Impahla ishiselwa ku-vacuum ize ihwamuke, bese umhwamuko ujiya ku-substrate.
I-Atomic Layer Deposition (ALD)
I-ALD yindlela lapho ifilimu ikhuliswa phezu kwe-substrate eyodwa ungqimba lwe-athomu ngesikhathi. Ilawulwa kakhulu futhi ingakha amafilimu anembe kakhulu navumelanayo.
I-Molecular Beam Epitaxy (MBE)
I-MBE iyindlela yokukhula ye-epitaxial lapho imishayo yama-athomu noma ama-molecule iqondiswe ku-substrate eshisayo ukuze yakhe ifilimu elincanyana elicwebezelayo.
Izinzuzo ze-Thin Film Deposition
Ukusebenza okuthuthukisiwe: Amafilimu anganikeza izakhiwo ezintsha ku-substrate, njengokumelana nokuklwebheka noma ukuqhutshwa kukagesi.
Ukusetshenziswa kwempahla encishisiwe: Ivumela ukwakhiwa kwamadivayisi ayinkimbinkimbi anokusetshenziswa okuncane kwezinto ezibonakalayo, ukunciphisa izindleko.
Ukwenza ngokwezifiso: Amafilimu angenziwa enzelwe ukuthi abe nezakhiwo ezithile zemishini, zikagesi, zamehlo, noma zamakhemikhali.
Izinhlelo zokusebenza
Amadivayisi we-Semiconductor: Ama-Transistors, ama-circuits ahlanganisiwe, nezinhlelo ze-microelectromechanical (MEMS).
I-Optical coatings: I-anti-reflective kanye ne-high-reflective coatings kumalensi namaseli elanga.
Izembatho ezivikelayo: Ukuvikela ukugqwala noma ukugqokwa kwamathuluzi nemishini.
Izicelo ze-Biomedical: Izingubo zokufakelwa kwezokwelapha noma amasistimu okulethwa kwezidakamizwa.
Ukukhethwa kwendlela yokubeka kuncike ezimfuneko ezithile zohlelo lokusebenza, okuhlanganisa uhlobo lwento okufanele ifakwe, izici zefilimu ezifiswayo, kanye nemikhawulo yezindleko.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Aug-15-2024