I-vacuum ion plating (i-ion plating ngamafuphi) ubuchwepheshe obusha bokwelapha obungaphezulu obuthuthukiswa ngokushesha ngeminyaka yawo-1970, olwahlongozwa ngu-DM Mattox we-Somdia Company e-United States ngo-1963. iqondise ukuhwamuka noma ukufafaza okokusebenza kwefilimu ku-vacuum atmosphere.
Owokuqala ukukhiqiza umhwamuko wensimbi ngokufudumeza nokuhwamukisa ifilimu, efakwe i-ionized ibe umhwamuko wensimbi kanye nama-athomu angathathi hlangothi anamandla aphezulu endaweni yokukhipha igesi ku-plasma, futhi ifinyelele engxenyeni engaphansi ukuze yakhe ifilimu ngokusebenza kwendawo kagesi. ;Okokugcina kusebenzisa ama-ion anamandla aphezulu (Ngokwesibonelo, i-Ar+) iqhumisa ubuso befilimu ukuze izinhlayiya ezifafaziwe zenziwe i-ion noma ama-athomu angathathi hlangothi anamandla aphezulu esikhaleni sokuphuma kwegesi, futhi abone ingaphezulu le-substrate. ukwakha ifilimu.
Le ndatshana ishicilelwe nguGuangdong Zhenhua, umkhiqizi weimishini yokufaka i-vacuum
Isikhathi sokuthumela: Mar-10-2023