Yiziphi izici ezithinta ubuthi obuhlosiwe ku-magnetron sputtering?

1, Ukwakhiwa kwezinhlanganisela zensimbi endaweni eqondiwe
Iphi inhlanganisela eyakhiwe ngesikhathi sokwenza inhlanganisela evela endaweni eqondiwe yensimbi ngenqubo yokufafaza okusebenzayo?Njengoba ukusabela kwamakhemikhali phakathi kwezinhlayiya zegesi esebenzayo kanye nama-athomu angaphezulu okuhlosiwe kukhiqiza ama-athomu ahlanganisiwe, ngokuvamile angavamile, ukushisa okusabelayo kufanele kube nendlela yokuphuma, ngaphandle kwalokho ukusabela kwamakhemikhali akukwazi ukuqhubeka.Ngaphansi kwezimo ze-vacuum, ukudluliswa kokushisa phakathi kwamagesi akunakwenzeka, ngakho ukusabela kwamakhemikhali kufanele kwenzeke endaweni eqinile.I-reaction sputtering yenza inhlanganisela ezindaweni eziqondiwe, izindawo ezingaphansi kwe-substrate, nezinye izakhiwo.Ukukhiqiza izinhlanganisela endaweni engaphansi kwe-substrate kuwumgomo, ukukhiqiza inhlanganisela kwezinye izindawo zesakhiwo kuwukumosha izinsiza, futhi ukukhiqiza izinhlanganisela endaweni okuqondiwe kuyo kuqala njengomthombo wama-athomu ayingxube futhi kube isithiyo sokuhlinzeka ngokuqhubekayo ama-athomu ayingxube.

2, Izinto ezithinta ubuthi obuqondiwe
Isici esiyinhloko esithinta ubuthi obuqondiwe isilinganiso segesi esabelayo kanye negesi efafazayo, igesi esabelayo eningi kakhulu izoholela ebuthini obuqondiwe.Inqubo ye-sputtering esebenzayo yenziwa endaweni eqondiwe endaweni yesiteshi yokufafaza kubonakala sengathi imbozwe inhlanganisela yokusabela noma inhlanganisela yokusabela iyakhunyulwa futhi iphinde iveze indawo yensimbi.Uma izinga lokukhiqiza okuhlanganisiwe likhulu kunezinga lokuhlubula okuhlanganisiwe, indawo yokumboza inhlanganisela iyakhula.Ngamandla athile, inani legesi yokusabela elibandakanyekayo ekukhiqizeni okuhlanganisiwe liyakhuphuka futhi izinga lokukhiqiza okuhlanganisiwe liyakhuphuka.Uma inani legesi yokusabela likhuphuka kakhulu, indawo yokuhlanganisa i-compound iyanda.Futhi uma izinga lokugeleza kwegesi elisabelayo lingakwazi ukulungiswa ngesikhathi, izinga lokukhuphuka kwendawo ehlanganisiwe alicindezelwa, futhi ishaneli yokufafaza izophinde imbozwe yinhlanganisela, lapho okuhlosiwe kokufafaza kuhlanganiswe ngokugcwele, okuhlosiwe ubuthi ngokuphelele.

3, Isenzo sokukhomba ushevu
(1) ukuqoqwa kwama-ion amahle: lapho ubuthi obuqondiwe, ungqimba lwefilimu evikelayo luzokwakhiwa endaweni okuhlosiwe, ama-ion aqondile afinyelela endaweni eqondiwe ye-cathode ngenxa yokuvaleka kwesendlalelo se-insulating.Hhayi ngqo ukungena cathode target surface, kodwa buthelela phezu target surface, kulula ukukhiqiza insimu ebandayo ukuze arc khulula - arcing, ukuze sputtering cathode akakwazi ukuqhubeka.
(2) ukunyamalala kwe-anode: lapho ubuthi obuhlosiwe, udonga lwegumbi le-vacuum olusekelwe futhi lufake ifilimu evikelayo, ukufinyelela ama-electron anode akakwazi ukungena ku-anode, ukwakheka kwe-anode ukunyamalala mkhuba.

4, Incazelo ebonakalayo ye-target poisoning
(1) Ngokuvamile, i-electron yesibili emission coefficient yezinhlanganisela zensimbi iphakeme kuneyensimbi.Ngemuva kobuthi obuhlosiwe, ingaphezulu lethagethi yizo zonke izinhlanganisela zensimbi, futhi ngemva kokushaywa ama-ion, inani lama-electron akhululiwe liyakhula, okuthuthukisa ukuqhutshwa kwesikhala futhi kunciphise ukuvinjelwa kwe-plasma, okuholela ku-voltage ephansi ye-sputtering.Lokhu kunciphisa izinga lokufafaza.Ngokuvamile i-sputtering voltage ye-magnetron sputtering iphakathi kuka-400V-600V, futhi uma kwenzeka ubuthi obuqondiwe, i-voltage ye-sputtering iyancipha kakhulu.
(2) Ithagethi yensimbi kanye nethagethi ehlanganisiwe ekuqaleni izinga lokufafaza lihlukile, ngokuvamile i-coefficient yokufafaza yensimbi ingaphezulu kwe-sputtering coefficient yenhlanganisela, ngakho izinga lokufafaza liphansi ngemva kobuthi obuqondiwe.
(3) Ukusebenza kahle kokufafaza kwegesi e-sputtering esebenzayo ekuqaleni kuphansi kunokusebenza kwegesi engasebenzi kahle, ngakho izinga lokufafaza elibanzi liyehla ngemva kokunyuka kwengxenye yegesi esebenzayo.

5, Izixazululo ze-target poisoning
(1) Sebenzisa amandla kagesi aphakathi nendawo noma amandla kagesi omsakazo.
(2) Yamukela isilawuli seluphu evaliwe yokungena kwegesi yokusabela.
(3) Yamukela okuhlosiwe okungamawele
(4) Lawula ukuguqulwa kwemodi yokumboza: Ngaphambi kokumboza, ijika lomphumela we-hysteresis wobuthi obuqondiwe liyaqoqwa ukuze ukugeleza komoya ongenisayo kulawulwe ngaphambili kokukhiqiza ubuthi obuqondiwe ukuze kuqinisekiswe ukuthi inqubo ihlezi ikumodi ngaphambi kokufakwa. izinga lehla kakhulu.

-Le ndatshana ishicilelwe nguGuangdong Zhenhua Technology, umkhiqizi wemishini yokufaka i-vacuum coating.