Ii-vacuum enamathelaInqubo yomshini ihlukaniswe: i-vacuum evaporation coating, i-vacuum sputtering coating kanye ne-vacuum ion coating.
1. I-vacuum evaporation coating
Ngaphansi kwesimo se-vacuum, yenza izinto zihwamuke, njengensimbi, ingxubevange yensimbi, njll. bese uwabeka endaweni engaphansi, indlela yokuhwamuka yokugcoba ivame ukusebenzisa ukushisa kokumelana, bese ukuqhuma kwe-electron beam ye-coating material, ibenze. Ihwamuke yaba esigabeni segesi, bese ifakwa endaweni engaphansi, ngokomlando, ukufakwa komhwamuko wevacuum ubuchwepheshe bangaphambili obusetshenziswa endleleni ye-PVD.
2. I-Sputtering enamathela
Igesi ingaphansi kokukhishwa okukhanyayo ngaphansi kwezimo ze-vacuum ezigcwele (Ar)-Okwamanje i-argon (Ar) i-athomu ion ibe yi-nitrogen ion (Ar), ama-ion asheshiswa ngamandla enkundla kagesi, futhi aqhume i-cathode target yenziwe ngezinto zokumboza, okuhlosiwe kuzochithwa futhi kufakwe endaweni engaphansi kwe-substrate Ama-ion esigameko ekufakweni kwe-sputter, ngokuvamile atholakala ngokukhipha okukhanyayo, aphakathi kuka-10-2pa kuya ku-10Pa, Ngakho-ke izinhlayiya ezifafaziwe kulula ukungqubuzana. nama-molecule egesi kugumbi le-vacuum lapho endizela endaweni engaphansi, okwenza indlela yokunyakaza ingahleliwe futhi ifilimu efakiwe kube lula ukufana.
3, i-ion enamathela
Ngaphansi kwezimo ze-vacuum, Ngaphansi kwesimo se-vacuum, Kusetshenziswe inqubo ethile ye-ionization ye-plasma ukuze kufakwe i-athomu yento enamathelayo ibe ama-ion. Ngesikhathi esifanayo kukhiqizwa ama-athomu amaningi angathathi hlangothi amaningi , acheme kabi ku-substrate.Ngale ndlela, ama-ion zifakwa endaweni engaphansi ngaphansi kokuchema okunegethivu okujulile ukuze zenze ifilimu elincanyana.
Isikhathi sokuthumela: Mar-23-2023