Lolu chungechunge lwemishini lisebenzisa izinhloso ze-magnetron ukuguqula izinto zokumboza zibe yizinhlayiya ezinosayizi we-nanometer, ezifakwa phezu kwama-substrates ukuze zenze amafilimu amancane.Ifilimu egoqwe ifakwe ekamelweni le-vacuum.Ngesakhiwo esimazombezombe esiqhutshwa ngogesi, ingxenye eyodwa ithola ifilimu kanti enye ibeka ifilimu.Iyaqhubeka idlula endaweni okuhlosiwe futhi ithola izinhlayiya ezihlosiwe ukuze zenze ifilimu eliminyene.
Isici:
1. Ukwakhiwa kwefilimu yokushisa okuphansi.Izinga lokushisa linomthelela omncane kwifilimu futhi ngeke likhiqize ukuguqulwa.Ilungele i-PET, i-PI namanye amafilimu amakhoyili ayisisekelo.
2. Ukushuba ifilimu kungenziwa yakhelwe.Izembatho ezacile noma eziwugqinsi zingaklanywa futhi zifakwe ngokulungiswa kwenqubo.
3. Multiple target indawo design, inqubo nezimo.Umshini wonke ungahlonyiswa ngamathagethi ayisishiyagalombili, angasetshenziswa njengamathagethi ensimbi alula noma ama-compound and oxide target.Ingasetshenziselwa ukulungisa amafilimu anongqimba olulodwa anesakhiwo esisodwa noma amafilimu anezingqimba eziningi anesakhiwo esiyinhlanganisela.Inqubo ivumelana nezimo kakhulu.
Izinto ezisetshenziswayo zingalungisa ifilimu yokuvikela ugesi, ibhodi lesifunda eliguquguqukayo, amafilimu ahlukahlukene e-dielectric, ifilimu ye-AR antireflection enezingqimba eziningi, ifilimu ye-HR ephikisayo ephezulu, ifilimu yombala, njll. imishini inobubanzi obubanzi kakhulu bezinhlelo zokusebenza, kanye nokubekwa kwefilimu yongqimba olulodwa. ingaqedwa ngokufakwa kwefilimu yesikhathi esisodwa.
Izinto zokusebenza zingasebenzisa okuqondiwe kwensimbi okulula okufana no-Al, Cr, Cu, Fe, Ni, SUS, TiAl, njll., noma okuhlosiwe okuhlanganisiwe okufana ne-SiO2, Si3N4, Al2O3, SnO2, ZnO, Ta2O5, ITO, AZO, njll.
Izinto zokusebenza zincane ngosayizi, zihlangene ekwakhiweni kwesakhiwo, zincane endaweni ephansi, ukusetshenziswa kwamandla okuphansi, futhi zivumelana nezimo ekulungiseni.Ilungele kakhulu ucwaningo lwenqubo kanye nentuthuko noma ukukhiqizwa kwenqwaba yenqwaba.