Ubuchwepheshe bokuhlunga kazibuthe

Ithiyori eyisisekelo yedivayisi yokuhlunga kazibuthe
Indlela yokuhlunga yedivayisi yokuhlunga kazibuthe yezinhlayiya ezinkulu ku-plasma beam imi kanje:
Kusetshenziswa umehluko phakathi kwe-plasma nezinhlayiya ezinkulu eziphethe kanye nesilinganiso se-charge-to-mass, kukhona "umgoqo" (okungaba i-baffle noma udonga lwamashubhu olugobile) obeka phakathi kwe-substrate nendawo ye-cathode, evimba noma yiziphi izinhlayiya ezihamba endaweni. umugqa oqondile phakathi kwe-cathode ne-substrate, kuyilapho ama-ion angaphambukiswa yi-magnetic field futhi adlule "kusithiyo" ku-substrate.

Umgomo wokusebenza wedivayisi yokuhlunga kazibuthe

Ensimini kazibuthe, Pe<

I-Pe kanye ne-Pi yi-Larmor radii yama-electron nama-ion ngokulandelana, futhi i-diameter yangaphakathi yesihlungi kazibuthe.Ama-electron ku-plasma athintwa amandla e-Lorentz futhi ajikeleze endaweni kazibuthe nge-axially, kuyilapho indawo kazibuthe inomphumela omncane ekuhlanganiseni kwama-ion ngenxa yomehluko phakathi kwama-ion nama-electron ku-Larmor radius.Kodwa-ke, lapho ukunyakaza kwe-electron eduze kwe-eksisi yedivayisi yokuhlunga kazibuthe, izoheha ama-ion eduze kwe-axial yokunyakaza okujikelezayo ngenxa yokugxila kwayo kanye nenkambu kagesi engalungile, futhi isivinini se-electron sikhulu kune-ion, ngakho-ke i-electron. idonsa njalo i-ion phambili, kuyilapho i-plasma ihlala ingathathi hlangothi ngokwe-quasi-electrically.Izinhlayiya ezinkulu azithathi hlangothi ngogesi noma zishajwe kabi kancane, futhi ikhwalithi inkulu kakhulu kunama-ion nama-electron, empeleni ayithinteki indawo kazibuthe nokunyakaza komugqa eduze kwe-inertia, futhi izohlungwa ngaphandle ngemva kokushayisana nodonga lwangaphakathi idivayisi.
Ngaphansi komsebenzi ohlanganisiwe wokugoba kwensimu kazibuthe kanye ne-gradient drift kanye nokushayisana kwe-ion-electron, i-plasma ingaphambuka kudivayisi yokuhlunga kazibuthe.Ku Izibonelo zethiyori ezivamile ezisetshenziswa namuhla imodeli ye-Morozov flux kanye ne-Davidson rigid rotor model, enesici esilandelayo esivamile: kukhona insimu kazibuthe eyenza ama-electron anyakaze ngendlela eqinile ye-helical.
Amandla okusebenza kazibuthe aqondisa ukunyakaza kwe-axial ye-plasma kudivayisi yokuhlunga kazibuthe kufanele abe ngale ndlela:

I-Mi, i-Vo, ne-Z ziyi-ion mass, isivinini sokuthutha, kanye nenani lezindleko ezithwalwa ngokulandelanayo.i-a iyi-diameter yangaphakathi yesihlungi kazibuthe, futhi u-e uyishaje ye-electron.
Kumele kuqashelwe ukuthi amanye ama-ion amandla aphezulu awakwazi ukuboshwa ngokugcwele yi-electron beam.Angase afinyelele odongeni lwangaphakathi lwesihlungi kazibuthe, okwenza udonga lwangaphakathi lube namandla amahle, okubuye luvimbele ama-ion ukuthi aqhubeke nokufinyelela odongeni lwangaphakathi futhi anciphise ukulahleka kwe-plasma.
Ngokwalesi simo, ingcindezi efanele yokuchema ingasetshenziswa odongeni lwedivayisi yokuhlunga kazibuthe ukuze kuvinjwe ukungqubuzana kwama-ion ukuze kuthuthukiswe ukusebenza kahle kwezokuthutha kwe-ion eqondiwe.

Ukuhlukaniswa kwedivayisi yokuhlunga kazibuthe
(1)Isakhiwo somugqa.Inkambu kazibuthe isebenza njengomhlahlandlela wokugeleza kwe-ion beam, inciphisa ubukhulu bendawo ye-cathode kanye nengxenye yamaqoqo ezinhlayiyana ezinkulu, kuyilapho iqinisa ukungqubuzana phakathi kwe-plasma, ikhuthaza ukuguqulwa kwezinhlayiya ezingathathi hlangothi zibe ama-ion futhi kunciphisa inani lama-macroscopic. amaqoqo ezinhlayiya, futhi kunciphisa ngokushesha inani lezinhlayiya ezinkulu njengoba amandla kazibuthe ekhula.Uma kuqhathaniswa nendlela evamile yokuhlanganisa i-arc ion ye-multi-arc, le divayisi ehlelekile inqoba ukuncipha okuphawulekayo kokusebenza kahle okubangelwa ezinye izindlela futhi ingaqinisekisa ngokuyisisekelo izinga lokumiswa kwefilimu elihlala njalo ngenkathi yehlisa inani lezinhlayiya ezinkulu cishe ngo-60%.
(2) Isakhiwo sohlobo lwejika.Nakuba isakhiwo sinamafomu ahlukahlukene, kodwa isimiso esiyisisekelo siyefana.I-plasma ihamba ngaphansi komsebenzi ohlanganisiwe wenkundla kazibuthe kanye nenkundla kagesi, futhi indawo kazibuthe isetshenziselwa ukuvala nokulawula i-plasma ngaphandle kokuchezuka ukunyakaza ngakundlela yemigqa yamandla kazibuthe.Futhi izinhlayiya ezingashajwa zizohamba eduze komugqa futhi zihlukaniswe.Amafilimu alungiselelwe yile divayisi yesakhiwo anobulukhuni obuphezulu, ubulukhuni obuphezulu obuphansi, ukuminyana okuhle, usayizi wokusanhlamvu olinganayo, kanye nokunamathela okuqinile kwesisekelo sefilimu.Ukuhlaziywa kwe-XPS kukhombisa ukuthi ubulukhuni bobuso bamafilimu e-ta-C ambozwe ngalolu hlobo lwedivayisi bungafinyelela ku-56 GPa, ngakho-ke idivayisi yesakhiwo egobile iyindlela esetshenziswa kakhulu futhi ephumelelayo yokususa izinhlayiya ezinkulu, kodwa ukusebenza kahle kwezokuthutha kwe-ion kudingeka ithuthuke ngokwengeziwe.Idivayisi yokuhlunga kazibuthe engu-90° bend ingelinye lamadivayisi wesakhiwo esigobile asetshenziswa kakhulu.Ukuhlolwa kuphrofayili engaphezulu yamafilimu e-Ta-C kubonisa ukuthi iphrofayili engaphezulu yedivayisi yokuhlunga kazibuthe engu-360° bend ayishintshi kakhulu uma iqhathaniswa nedivayisi yokuhlunga kazibuthe engu-90° bend, ngakho umphumela wokuhluza kazibuthe okungu-90° bend wezinhlayiya ezinkulu ungaba ngokuyisisekelo. okuzuziwe.Idivayisi yokuhlunga kazibuthe engu-90° igoba ngokuyinhloko inezinhlobo ezimbili zezakhiwo: enye i-solenoid egobile ebekwe egumbini le-vacuum, kanti enye ifakwa ngaphandle kwegumbi le-vacuum, futhi umehluko phakathi kwazo usesakhiweni kuphela.Ingcindezi yokusebenza yedivayisi yokuhlunga kazibuthe engu-90° bend iku-oda lika-10-2Pa, futhi ingasetshenziswa ezinhlobonhlobo zezinhlelo zokusebenza, njenge-coating nitride, i-oxide, i-amorphous carbon, ifilimu ye-semiconductor nefilimu yensimbi noma engeyona eyensimbi. .

Ukusebenza kahle kwedivayisi yokuhlunga kazibuthe
Njengoba akuzona zonke izinhlayiya ezinkulu ezingalahlekelwa amandla e-kinetic ngokungqubuzana okuqhubekayo nodonga, inombolo ethile yezinhlayiya ezinkulu zizofinyelela ku-substrate ngokusebenzisa i-outlet yepayipi.Ngakho-ke, idivayisi yokuhlunga kazibuthe ende futhi emincane inokusebenza okuphezulu kokuhlunga kwezinhlayiya ezinkulu, kodwa ngalesi sikhathi kuzokwandisa ukulahlekelwa kwama-ion okuhlosiwe futhi ngesikhathi esifanayo kwandise ubunzima besakhiwo.Ngakho-ke, ukuqinisekisa ukuthi idivayisi yokuhlunga kazibuthe inokususwa okuhle kakhulu kwezinhlayiya ezinkulu kanye nokusebenza kahle okuphezulu kokuthutha kwe-ion kuyimfuneko edingekayo ukuze ubuchwepheshe bokuhlanganisa ama-arc ion amaningi abe nethemba elibanzi lokufaka amafilimu amancane asebenza kahle.Ukusebenza kwedivayisi yokuhlunga kazibuthe kuthintwa amandla enkundla kazibuthe, ukuchema kwe-bend, indawo yokuvula i-mechanical baffle, umthombo we-arc wamanje kanye ne-engeli yesigameko sezinhlayiyana ezishajiwe.Ngokusetha amapharamitha anengqondo wedivayisi yokuhlunga kazibuthe, umphumela wokuhlunga wezinhlayiya ezinkulu kanye nokusebenza kahle kokudluliswa kwe-ion kwethagethi kungathuthukiswa ngempumelelo.